One Axis -
Stages For Single-plane Movement

Ideally Suited for Precise nm Positioning

Stages that Move in a Single X or Z Axis

One axis piezo stages offer the ability to precisely position samples or other objects in one direction. Special versions are available for use in vacuum or cryogenic conditions, as well as designs for easy integration into larger OEM assemblies.

For the semiconductor, microbiology, photonics and many other industries, precise nm movement in a single axis is crucial. piezosystem jena has several series of 1-axis piezo stages with motion up to 1500 µm, high stiffness, and sub nm resolution.

There are stages with apertures for lasers and viewing, and stages that are very small and optionally include closed loop positioning sensors for precise control.

The MIPOS objective positioners also are 1-axis solutions.

These piezo stages do not generate magnetic fields. Some stages optionally include a pre-load for dynamic movement.

nanoSX 800 Pictured

Specifics:

PZ series stages are especially designed for high resolution and high precision movement in the Z-axis.

nanoSX piezo stages offer parallel guiding and msec rise time.

The ScaniusOne piezo stage is designed for object scanning over a large area.

PU and PX series actuators have an integrated preload are ideally suited for nm-precise positioning of optic components such as mirrors and laser diodes.

Stages Characteristics:

  • Single axis motion vertically or horizontally
  • Travel range up to 1500 µm
  • Integrated preload varieties
  • High resonant frequency
  • Sub nm resolution available
  • Optional integrated positioning sensors
  • Vacuum compatible version available
  • No magnetic field generation

Piezo Semiconductor Wafer Stage

PZ 250 CAP WL

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ScaniusOne

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PZ 700

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PZ 400 OEM

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PZ 400

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PZ 200

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PZ 38

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nanoSX 800

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nanoX 400

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nanoX 200

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PU 100

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PU 40

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PX 1500

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PX 500

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PX 400

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PX 200

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PX 100

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PX 38

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Large Ring Mipos Lens Objective Positioner

MIPOS 16

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MIPOS 600 SG

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MIPOS 500

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nanoMIPOS 400

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MIPOS 250

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MIPOS 100 Piezo Objective Positioner

MIPOS 100

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MIPOS 20

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