nanoSX 800

  • Up to 900 µm range of motion
  • Central aperture of 12.5 mm
  • Sub-nm resolution
  • Excellent trajectory trueness
  • High load capability
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Description

The nanoSX 800 combines the high accuracy and the high speed of a piezo positioning system with a special actuating design for long travel motion. The stage offer a compact design with a height of only 20 mm, outside dimensions of only 60 x 60 mm, and a free center space of 12,5 mm.

The ultra flat design of the stage and the ease to combine the stage to an XY scanning system make the system useful for a wide variety of applications.

Based on the unique bi-directional actuating nanoX design, this series can move high load masses. The design guarantees excellent guidance accuracy without parasitic motion and improves the settling time in an active manner.

The nanoSX 800 can be equipped with a high resolution feedback system for closed-loop control.

Common applications for this stage include high resolution metrology, X and XY scanning, and dynamic positioning. It is available in cryogenic and vacuum compatible versions.

Technical Data

UNITnanoSX 800nanoSX 800 CAPnanoSX 800 CAP Digital
Part #T-128-00T-125-06ET-128-06D
AxisXXX
Motion in Open Loop (±10%)*μm900900900
Motion in Closed Loop (±0,2%)*μm800800
Resolution**nm1.644
Dimensions (L x W x H)mm60 x 20 x 6060 x 30 x 7560 x 30 x 75
Weightg300410410
*Typical value measured with ENV40 nanoX amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

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