The new MIPOS 800 objective positioner offers a nanopositioning scanning range up to 800 µm in open-loop operation, and 650 µm in closed-loop operation using a strain-gauge sensor. Resonant frequency is up to 100 Hz. Closed-loop step resolution is 12 nm.

Wafer production processes such as stealth dicing, lithography, doping, implanting and planarization makes fast precise positioning of bigger substrates a must. Our 12” z-axis wafer positioning system offers precise hold and repeat positioning for steady processes in production and process control. Our 3-axis piezo stages offer movements free of play in XYZ with up to 100 μm travel range, which is ideally suited for demanding AFM and scanning applications.

By applying a silicon coating to internal components, these unique fiber switches are shielded from high levels of moisture in the air. This greatly increases their ability to withstand relative humidity up to 98% before failure.

Space can be a challenging environment – but not for piezo technology actuators. Our fast-steering mirror drive technology is immune to magnetic influences and is radiation tolerant – a perfect solution for satellites and space vehicles.