Semiconductor Manufacturing with Piezo Products
Piezo Actuators for the Semiconductor Industry

Wafer production processes such as stealth dicing, lithography, doping, implanting and planarization makes fast precise positioning of bigger substrates a must. Our 12” z-axis wafer positioning system offers precise hold and repeat positioning for steady processes in production and process control. Our 3-axis piezo stages offer movements free of play in XYZ with up to 100 μm travel range, which is ideally suited for demanding AFM and scanning applications.

Semiconductor Industry Applications
Optical Fiber Switch built for Humidity Resistance
Humidity Resistant Fiber Switches

By applying a silicon coating to internal components, these unique fiber switches are shielded from high levels of moisture in the air. This greatly increases their ability to withstand relative humidity up to 98% before failure.

Optical Fiber Switches
Space Communications using Piezo Components
Piezo Fast Steering Mirror Solutions for Space

Space can be a challenging environment – but not for piezo technology actuators. Our fast-steering mirror drive technology is immune to magnetic influences and is radiation tolerant – a perfect solution for satellites and space vehicles.

Aerospace Industry Applications

Precision Solutions for Semiconductor Manufacturers

Our Product Lines

Piezo Fast Steering Mirrors

Our tip-tilt piezo stages are fast, compact, lightweight and above all reliable. By virtue of their unique stiff design, the beam steering piezo actuators have instantaneous responses, short settling times and can oscillate in the kHz range.

Piezo FSMs

Piezoelectric Actuators

A piezo actuator is a high precision ceramic actuator that converts electrical energy into linear expansion. These solid-state actuators are controlled using inverse piezoelectric technology and offer high speed and force motion with sub-nanometer resolution.

Piezo Actuators

Piezo Driven Fiber Switching

Fiber switches are the perfect solution to analyze light sources with only one spectrometer. Our fiber switches offer up to 9 channels which can be switched within milliseconds. Controlled by piezo actuators, our fiber switches have no internal optical components and therefore avoid any form of optical aberration.

Optical Fiber Switches

Piezo Motion Control

Analyzing a large object in precise detail has traditionally been a challenge. Typically positioning systems have either been highly accurate for small motions, or fast for larger motions – but not both. Users had to make a compromise between one or the other form of motion.

Piezo 1-Axis Stages

Discover the World of piezosystem jena

new series

New PAHS Series – High Stroke Piezo Actuators with 4x Travel. Open & Closed-Loop Models.

PAHS Actuators

NV 200/D Controller

Piezo Controller

High Power Piezo Actuators by piezosystem jena

hpowermotion Solutions
Piezosystem Jena OEM Piezo Products

Scalability for Industry Solutions

OEM Manufacturing

As a leading provider of high quality OEM piezo actuators and piezo stages, piezosystem jena works closely with the semiconductor, photonics and aerospace industries. Research engineers work consistently with industry experts on developing the next generation of new micro-positioning tools.

Solutions for Applications

Welcome to the Precise World of piezosystem jena

With more than 30 years of experience, piezosystem jena is a worldwide developer and manufacturer of incredibly precise piezo actuators and piezo stages. As a privately owned company, there is a strong focus on creating customized solutions for industrial and research applications. Working together with leading OEMs in the semiconductor, photonics, metrology, aerospace and the automotive industries, piezosystem jena has developed piezo systems that can achieve extreme levels of precision, high force generation, and stable high-frequency movements.

Since 1991

Experts in the development and manufacturing of nanopositioning equipment.

Research & Discovery

Deep knowledge of piezo-technology based on interactions as consultants and through research.


Experienced piezo-technology product representatives in 25+ countries.

Events and News

19.06.2024 / Event

W3+ Fair - Jena

W3+ FAIR Date: September 25 - 26, 2024, 9:30 am - 5:00 pm Venue: Sparkassen Arena, Jena, Germany Location: Hall 2, Booth F8a

17.06.2024 / Event

SEMICON West 2024

SEMICON West 2024, Date: July 9 - 11, 2024, Venue: Moscone Center, San Francisco, CA USA, Location: Booth #6816

23.03.2024 / Event

SEMICON Europa 2024

SEMICON Europa 2024. Date: November 12 - 15, 2024 Venue: Messe München - Munich, Germany. Booth C2.234, Hall C2 co-located with Electronica.

One of Germany’s top SME employers!

Locations and distribution worldwide