Wafer production processes such as stealth dicing, lithography, doping, implanting and planarization makes fast precise positioning of bigger substrates a must. Our 12” z-axis wafer positioning system offers precise hold and repeat positioning for steady processes in production and process control. Our 3-axis piezo stages offer movements free of play in XYZ with up to 100 μm travel range, which is ideally suited for demanding AFM and scanning applications.
By applying a silicon coating to internal components, these unique fiber switches are shielded from high levels of moisture in the air. This greatly increases their ability to withstand relative humidity up to 98% before failure.
Space can be a challenging environment – but not for piezo technology actuators. Our fast-steering mirror drive technology is immune to magnetic influences and is radiation tolerant – a perfect solution for satellites and space vehicles.
Precision Solutions for Semiconductor Manufacturers
Our Product Lines
Piezo Fast Steering Mirrors
Our tip-tilt piezo stages are fast, compact, lightweight and above all reliable. By virtue of their unique stiff design, the beam steering piezo actuators have instantaneous responses, short settling times and can oscillate in the kHz range.
A piezo actuator is a high precision ceramic actuator that converts electrical energy into linear expansion. These solid-state actuators are controlled using inverse piezoelectric technology and offer high speed and force motion with sub-nanometer resolution.
Fiber switches are the perfect solution to analyze light sources with only one spectrometer. Our fiber switches offer up to 9 channels which can be switched within milliseconds. Controlled by piezo actuators, our fiber switches have no internal optical components and therefore avoid any form of optical aberration.
Analyzing a large object in precise detail has traditionally been a challenge. Typically positioning systems have either been highly accurate for small motions, or fast for larger motions – but not both. Users had to make a compromise between one or the other form of motion.
As a leading provider of high quality OEM piezo actuators and piezo stages, piezosystem jena works closely with the semiconductor, photonics and aerospace industries. Research engineers work consistently with industry experts on developing the next generation of new micro-positioning tools.
With more than 30 years of experience, piezosystem jena is a worldwide developer and manufacturer of incredibly precise piezo actuators and piezo stages. As a privately owned company, there is a strong focus on creating customized solutions for industrial and research applications.
Working together with leading OEMs in the semiconductor, photonics, metrology, aerospace and the automotive industries, piezosystem jena has developed piezo systems that can achieve extreme levels of precision, high force generation, and stable high-frequency movements.
Experts in the development and manufacturing of nanopositioning equipment.
Research & Discovery
Deep knowledge of piezo-technology based on interactions as consultants and through research.
Experienced piezo-technology product representatives in 25+ countries.