Wafer production processes such as stealth dicing, lithography, doping, implanting and planarization makes fast precise positioning of bigger substrates a must. Our 12” z-axis wafer positioning system offers precise hold and repeat positioning for steady processes in production and process control. Our 3-axis piezo stages offer movements free of play in XYZ with up to 100 μm travel range, which is ideally suited for demanding AFM and scanning applications.

By applying a silicon coating to internal components, these unique fiber switches are shielded from high levels of moisture in the air. This greatly increases their ability to withstand relative humidity up to 98% before failure.

Space can be a challenging environment – but not for piezo technology actuators. Our fast-steering mirror drive technology is immune to magnetic influences and is radiation tolerant – a perfect solution for satellites and space vehicles.

Established in 1991, piezosystem jena offers extensive knowledge and in-depth technical expertise in the application of piezo technology, nano-positioning tasks, and in the design of high quality piezo flexure stages and piezo actuator systems.

Semiconductor manufacturers design chips with structures down to 4 nanometers. This requires positioning systems with the highest level of next-limit precision.

The alignment of laser beams, positioning of microscope objectives, and fine adjustment of samples demands on precise and rapid movements. Based on the inverse piezoelectric effect, products by piezosystem jena offer unique technical characteristics compared to other solutions on the market including sub-nanometer resolutions, instantaneous positioning, and high reliability.