Image of MIPOS 400 Series Piezo Objective Focus Positioner with Mitutoyo Lens

MIPOS - Piezo Objective Positioners

The piezo objective positioner series MIPOS is made for high precision and accurate micro lens movement.

Bring Your Microscope to the Next Level

MIPOS objective positioners allow a microscope or other optical device to precisely focus and act as a piezo scanner with sub-nanometer resolution. These high quality lens positioners are simple to attach to standard microscopes and provide a quick easy way to upgrade a microscopy system.

This z-axis actuating system for precise lens objective positioning is made for applications such as single photon microscopy, semiconductor manufacturing, laser scanning microscopy, and confocal microscopy. In general, for all kinds of very precise high resolution microscope scanning and sub-nanometer focusing. The MIPOS piezo lens positioner is able to move the optical objective lens with unique position repeatability in the sub-nanometer range. The piezo objective positioner reacts immediately if the controller signal is adjusted. This solution offers high speed and high dynamic performance as a piezo objective slide scanners, confocal scanners and other types of optical scanners and microscopes.

Animation of MIPOS 100 Series of Piezo Objective Focus Positioner
MIPOS 100 Animation

Threading adapters are available allowing these objective positioners to be used with all standard microscopes – standard or inverted applications. Threads are available for Zeiss, Leica, Nikon, Olympus etc. microscopy systems.


Video: MIPOS – Precision Objective Positioners

YouTube Video Thumbnail of piezosystem jena MIPOS series Piezo Objective Focus Positioner

Whitepaper: Beyond Microscopy – MIPOS in Industry Applications

Cover Image of MIPOS Piezo Focus Positioners Brochure
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Technical Principal:

A piezo actuator is mounted in a unique lever transmission design using flexure hinges. The nanometer motion of the piezo actuator is controlled by a precise electrical signal, directing it to move to the specified location. The sophisticated monolithic guidance design of the solid flexure hinges means the trajectory is free of mechanical play and friction – a feature of all piezosystem jena stages.

Due to this technology, the motion is parallel to the optical beam. The resolution is very high and in practice only limited by the voltage noise of the power supply. This is why we can guarantee high accuracy only when also using piezosystem jena electronics.

All MIPOS systems can be equipped with an integrated positioning feedback sensor to check and control the exact accuracy of these fine focus scanner systems.

MIPOS® Series Characteristics:

  • Piezo focus fine scanner adjustment
  • Compact design
  • Parallelogram design with high resonant frequency
  • Parallel motion inside the optical beam
  • Easy to attach on microscopes
  • Flexible use on different microscopes and in other optical systems
  • Cost effective solution for fine adjustment on the microscope
  • Available as “upside-down” versions for inverse microscopes


Discover Our Customized OEM MIPOS Solutions

Our standard MIPOS series is built for exceptional high-precision focusing, but demanding applications like semiconductor and display inspection require next-level stability. To eliminate “ghost flaws” caused by microscopic machine wobbles during deep vertical scans, we can customize these systems to cut the lateral runout down to ≤ 50 nm—a 7-fold improvement in precision.

Read the application note of OEM MIPOS for High-Precision Surface Inspection!

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nano

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MIPOS 100 Series Piezo Objective Positioner as the Page Banner Image

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Piezo Objective Focus Positioner der MIPOS 20-Serie – Bannerseitenbild

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