MIPOS 500

  • 500 µm focusing range
  • Compact design
  • High resonant frequency
  • Easy to attach on microscopes
  • Flexibility using Flex-Adapters
  • Optional feedback sensor
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MIPOS 500 Description

The systems of the MIPOS 500 series offer a nano-positioning and scanning range up to 500 µm in open-loop operation, and 400 µm in closed-loop. They can be assembled with objectives that have a diameter of up to 40 mm.

Parallelogram design guarantees high parallel motion without influencing the optical path. The precise positioning repeatability of the MIPOS 500 series can be guaranteed by the use of the optional integrated measurement system. The design includes an integrated pre-load of the actuator that offers high resonant frequency and highly parallel motion – and is available in an upside-down version for inverted microscopes.

Due to the unique features of the MIPOS 500 series, fast scanning applications can be accurately realized with the shortest settling times.

Technical Data

MIPOS SeriesUNITMIPOS 500MIPOS 500 UDMIPOS 500 SGMIPOS 500 SG UD
Part # for threadM25 x 0.75O-350-00O-360-00O-350-01O-360-01
W0.8 x 1/36″ (RMS)O-354-00O-364-00O-354-01O-364-01
M26 x 0.75O-355-00O-365-00O-355-01O-365-01
M27 x 0.75O-356-00O-366-00O-356-01O-366-01
M32x0.75O-357-00O-367-00O-357-01O-367-01
AxisZZZZ
Motion in Open-Loop (±10%)*μm500500500500
Motion in Closed-Loop (±0,2%)*μm400400
Resolution Open-Loop**nm0.90.90.90.9
Resolution Closed-Loop**nm1212
Dimensions (L x W x H)mm60.5 x 50 x 36.460.2 x 50 x 35.560.5 x 50 x 40.162 x 50 x 41.5
Weightg370370370370
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

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