Excellent dynamic properties due to high resonant frequencies
Integrated mechanical pre-load
Tensile forces up to 350 N
Motion up to 140 µm (large ranges are available)
High stiffness of up to 200 N/µm
Vacuum and low temperature versions available
Flat, round and threaded heads available
Series PA, PA/T and PAHL
Excellent dynamic properties due to high resonant frequencies
Integrated mechanical pre-load
Tensile forces up to 350 N
Motion up to 140 µm (large ranges are available)
High stiffness of up to 200 N/µm
Vacuum and low temperature versions available
Flat, round and threaded heads available
Series PA, PA/T and PAHL
Excellent dynamic properties due to high resonant frequencies
Integrated mechanical preload
Tensile forces up to 150 N
Motion up to 140 µm (large ranges are available)
High stiffness of up to 190 N/µm
Vacuum and low temperature versions available
Flat, round and threaded heads available
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PA, PAT & PAHL Actuators – Description
The PA, PA/T and PAHL series piezo actuators are all stack type actuators manufactured incorporating multilayer technology. They are internally pre-loaded with a mechanical spring, making them ideal for dynamic applications. The ability to generate a large force, and be subjected to high mass loading makes them particularly useful for machine tools and dynamic scanning systems. These actuators have a uniform diameter of either 14 or 20 mm depending on series. Strain gauge (SG) is used for closed-loop systems.
Piezo actuators should only be fastened with screws or clamps on the bottom plate of the actuator. During the installation and use, it is important not to subject the actuator tip to non-axial forces.
The actuator head is available in three versions: round head piece is standard, flat head option, and M3 thread on demand.
PA Series – Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
PA 8/14
PA 120/14
PA 8/14 SG
PA 120/14 SG
Part #
B-201-00
B-214-00
B-201-01
B-214-01
Motion in Open-Loop (-10/+20%)*
μm
10
140
–
–
Motion in Closed-Loop (±0.2%)*
μm
–
–
8
112
Capacitance (±20%)**
μF
0.8
12.6
0.8
12.6
Stiffness
N/μm
85
6
85
6
Resolution in Open-Loop***
nm
0.02
0.29
–
–
Resolution in Closed-Loop***
nm
–
–
0.1
2.8
Dimensions – Length
mm
28
145
28
145
Diameter
mm
14
14
14
14
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.
PA/T Series – Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
PA 35/T14
PA 120/T14
PA 35/T14 SG
PA 120/T14 SG
Part #
P-354-00
P-360-00
P-354-01
P-360-01
Motion in Open-Loop (-10/+20%)*
μm
42
125
–
–
Motion in Closed-Loop (±0.2%)*
μm
–
–
34
100
Capacitance (±20%)**
μF
3.6
10.8
3.6
10.8
Stiffness
N/μm
20
7
20
7
Resolution in Open-Loop***
nm
0.08
0.25
–
–
Resolution in Closed-Loop***
nm
–
–
0.7
1.0
Dimensions – Length
mm
53
125
53
125
Diameter
mm
14
14
14
14
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.
PAHL Series – Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
PAHL 18/20
PAHL 200/20
PAHL 18/20 SG
PAHL 200/20 SG
Part #
P-171-00
P-180-00
P-171-01
P-180-01
Motion in Open-Loop (-10/+20%)*
μm
21
200
–
–
Motion in Closed-Loop (±0.2%)*
μm
–
–
17
160
Capacitance (±20%)**
μF
7
70
7
70
Stiffness
N/μm
165
17
165
17
Resolution in Open-Loop***
nm
0.04
0.4
–
–
Resolution in Closed-Loop***
nm
–
–
0.4
4.0
Dimensions – Length
mm
36
198
40
198
Diameter
mm
20
20
20
20
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.