TRITOR 100

  • 3D nanopositioning stage
  • Compact design with integrated feedback sensors available
  • Flexure hinge design without mechanical play
  • Motion range up to 100 µm
  • Ultra precise translation based on FEA-optimized parallelogram design
  • High resolution positioning
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Description

The TRITOR 100 has a parallel X, Y and Z motion range of 100 µm per axis. The unique cube design of the flexure guiding system allows for excellent usability with zero friction. With a combination of high stiffness and excellent straightness of motion, the three-axes piezo positioner TRITOR 100 is an ideal solution for high precision positioning in the nanometer range for fiber alignment, laser-uses, and many other micro positioning tasks.

Dynamic scan applications are a typical utilization for the TRITOR 100. The simultaneous motion available in X, Y and Z directions, offers large degrees of freedom during use. All piezo stages can be made with special materials for specialized applications such as vacuum or cryogenic applications.

Through-holes are used for attaching the positioning system which is important for all dynamic applications. On the top plate there are several pin holes and threaded holes for the mounting of external components. The three dimensional piezo elements are built with reliable piezo-stack actuators. The TRITOR 100 includes flexible insulation that is well suited for high dynamic applications.

Technical Data

UNITTRITOR 100TRITOR 100 SGTRITOR 100 CAP
Part #T-403-00T-403-21T-403-06
AxisX, Y, ZX, Y, ZX, Y, Z
Motion in Open Loop (±10%)*μm100100100
Motion in Closed Loop (±0.2%)*μm8080
Resolution**nm0.22.01.0
Dimensions (L x W x H)mm40 x 40 x 3440 x 40 x 3460 x 60 x 41
Weightg165160550
*Typical value measured with a NV 40/3 CLE amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

Related Products

TRITOR 101 and 102

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