MIPOS 16

  • 16 µm adjustment range (open loop)
  • Large aperture
  • High stiffness for lowest settling times
  • Typical step resolution of 0.04 nm
  • Additional load of up to 3 kg
  • For 4" and 6" objectives (others upon request)
  • Horizonal installation recommended
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Description

The MIPOS is specifically designed for high precision positioning of optical systems with accuracy in the sub-nanometer range. The high resolution and fast response time of the MIPOS 16 offer new possibilities, especially for white light interferometers.

Based on its unique design, which includes an aperture up to 104 mm and a stage height down to 42 mm, the MIPOS 16 offers technical specifications that match the requirements for white light interferometry. White light interferometry has become one of the most effective 3D surface measurement methods. Piezoelectric actuators are able to significantly improve accuracy and speed due to their virtually unlimited resolution and fast response time. The MIPOS 16 can achieve a focus range of up to 16 µm and a single step resolution of less than 0.1 nm, while operating in a voltage range between 20 and 130 V.

The MIPOS 16 is made for integration into metrology set-ups and devices. The robust drive is equipped with a high resolution piezo based actuating system. The internal mechanical pre-load design enables the MIPOS to operate in highly dynamic environments while reducing the settling time down to microseconds.

Technical Data

MIPOS SeriesUNITMIPOS 16-158MIPOS 16 M85
Part #O-309-50O-309-10
AxisZZ
Motion in Open Loop (±10%)*μm1616
Resolution Open Loop**nm0.040.04
Dimensions (L x W x H)mm158 x 4293 x 50
Weightg1240300
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

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