nanoMIPOS 400

  • 400 µm focusing range and sub-nm step width
  • Maximum lens diameter of 39mm
  • Temperature compensated
  • Short settling time due to high stiffness
  • Universal thread adapters
  • Optional Integrated capacitance feedback sensor
  • Applicable for standard and inverse microscopy
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Description

The nanoMIPOS offers a nano-positioning and scanning range up to 400 µm in open loop operation, as well as 320 µm in closed loop. The system can be assembled with objectives of up to 39 mm in diameter.

The sophisticated monolithic guidance design, consisting of solid flexure hinges, means the trajectory is free of mechanical play and friction – a feature offered by all piezosystem jena stages.

The advanced nanoMIPOS 400 design is FEA optimized to show an outstanding minimum of lateral and rotational offset, as well as excellent guidance accuracy, while offering robustness against off center and lateral loads.

To avoid drift and hysteresis, the nanoMIPOS 400 can be equipped with a capacitive measurement system. In combination with the piezosystem jena controller, this system offers high stability, linearity, repeatability and accuracy in closed loop operation.

Technical Data

MIPOS SeriesUNITnanoMIPOS 400nanoMIPOS CAP
Part # for threadM25 x 0.75O-543-00O-543-06
W0.8 x 1/36″ (RMS)O-544-00O544-06
M26 x 0.75O-545-00O-545-06
M27 x 0.75O-546-00O-546-06
M32x0.75O-547-00O-547-06
AxisZZ
Motion in Open Loop (±10%)*μm400400
Motion in Closed Loop (±0,2%)*μm320
Resolution Open Loop**nm0.80.8
Resolution Closed Loop**nm1
Dimensions (L x W x H)mm65 x 45 x 4065 x 45 x 40
Weightg300315
*Typical value measured with a 30DV50 nanoX amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

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