MIPOS 600 SG

  • 600 µm focusing range
  • Compact design
  • High resonant frequency
  • Easy to attach onto microscopes
  • Flexibility with Flex-Adapters
  • Integrated SG feedback sensor
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MIPOS 600 SG – Description

The MIPOS 600 SG offers a nanopositioning and scanning range up to 600 µm in open-loop operation, and 500 µm in closed-loop using a strain-gauge sensor. It can be used with objectives that have a diameter of up to 40 mm.

Unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 600 SG can be guaranteed by the use of the strain-gauge integrated measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and highly parallel motion.

Due to the unique features of the MIPOS 600 SG, fast scanning applications can be accurately realized with short settling times.

Technical Data

UnitMIPOS 600 SG
Part NumberO-380-01D
AxisZ
Motion in Open-Loop (±10%)*μm600
Motion in Closed-Loop (±0,2%)*μm500
Resolution Open-Loop**nm0.9
Resolution Closed-Loop**nm12
Dimensions (L x W x H)mm60.5 x 50 x 40.1
Weightg370
*Typical values measured with a 0.7 mV controller. **The resolution is only limited by the noise of the power amplifier and metrology.

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