• 600 µm focusing range
  • Compact design
  • High resonant frequency
  • Easy to attach on microscopes
  • Flexibility with Flex-Adapter
  • Integrated feedback sensor
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MIPOS 600 SG – Description

The systems of the MIPOS 600SG OEM series offer a nano-positioning and scanning range up to 600 µm in open-loop operation, and 500 µm in closed-loop. They can be assembled with objectives with a diameter of up to 40 mm.

Unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 600SG OEM can be guaranteed by the use of the integrated measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and highly parallel motion.

Due to the unique features of the MIPOS 600 series, fast scanning applications can be accurately realized with the shortest settling times.

Technical Data

Part NumberO-380-01D
Motion in Open-Loop (±10%)*μm600
Motion in Closed-Loop (±0,2%)*μm500
Resolution Open-Loop**nm0.9
Resolution Closed-Loop**nm12
Dimensions (L x W x H)mm60.5 x 50 x 40.1
*Typical value measured with a EVD125 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

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