Accurate parallel motion due to parallelogram design
Motion without mechanical play
High resolution in nm and sub-nm range
Motion up to 100 µm
Integrated lever transmission
XY and XYZ configurations compatible
Precision pin holes for accurate adjustment
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PU 100 – Description
The PU 100 consists of only one metallic part that allows for excellent mechanical stability and the ability for it to work dynamically.
This translation stage shows a nearly linear motion by an applied voltage signal from -20 up to 130 V.
This stage can be combined for XYZ 3D motion systems. The basic flexure stage is equipped with the threads for mounting. Each piezo system is supplied with the necessary screws and parts for a multi-axis configuration.
Technical Data
UNIT
PU 100
PU 100 SG
Part #
T-502-00
T-502-01
Axis
1
1
Motion in Open Loop (±10%)*
μm
100
100
Motion in Closed Loop (±0,2%)*
μm
–
80
Resolution Open Loop**
nm
0.2
0.2
Resolution Closed Loop**
nm
–
2.0
Dimensions (L x W x H)
mm
50.5 x 25 x 25
50.5 x 25 x 25
Weight
g
72
74
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.