PU 100

  • High mechanical stability due to high stiffness
  • Accurate parallel motion due to parallelogram design
  • Motion without mechanical play
  • High resolution in nm and sub-nm range
  • Motion up to 100 µm
  • Integrated lever transmission
  • XY and XYZ configurations compatible
  • Precision pin holes for accurate adjustment
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PU 100 – Description

The PU 100 consists of only one metallic part that allows for excellent mechanical stability and the ability for it to work dynamically.

This translation stage shows a nearly linear motion by an applied voltage signal from -20 up to 130 V.

This stage can be combined for XYZ 3D motion systems. The basic flexure stage is equipped with the threads for mounting. Each piezo system is supplied with the necessary screws and parts for a multi-axis configuration.

Technical Data

Part #T-502-00T-502-01
Motion in Open Loop (±10%)*μm100100
Motion in Closed Loop (±0,2%)*μm80
Resolution Open Loop**nm0.20.2
Resolution Closed Loop**nm2.0
Dimensions (L x W x H)mm50.5 x 25 x 2550.5 x 25 x 25
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

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