PX 100

  • Accurate parallel motion
  • Motion range up to 100 µm
  • No mechanical play
  • Optional Integrated feedback sensor
  • Easily combined with other piezo electrical systems
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Description

Due to the nature of the solid state flexure and parallelogram construction, the PX 100 stage can travel without any mechanical play, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This stage can be easily combined with XY and tilting piezoelectric modules offering positioning with many degrees of freedom.

The PX 100 can be equipped with integrated measurement systems that compensates for hysteresis. Depending on the exact system configuration, very accurate repeatability in the low nanometer range is possible.

Because of the integrated preload, the elements are able to perform dynamic work. They are therefore well suited for scanning applications in optics, semiconductor and molecular biological applications.

Technical Data

UNITPX 100PX 100 SG
Part #T-104-00T-104-01
AxisXX
Motion in Open Loop (±10%)*μm100100
Motion in Closed Loop (±0,2%)*μm80
Resolution Open Loop**nm0.20.2
Resolution Closed Loop**nm2
Dimensions (L x W x H)mm40 x 40 x 2040 x 40 x 20
Weightg8590
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

Applications

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