- Accurate parallel motion
- Motion range up to 200 µm
- No mechanical play
- Optional Integrated feedback sensor
- Easily combined with other piezo electrical systems
- Precision pin-holes for accurate adjustment
The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play in the X and Z directions. They provide a much higher resolution than is possible with mechanical or electromechanical systems.
The PX 200 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with large degrees of freedom.
These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.
|UNIT||PX 200||PX 200 SG||PX 200 CAP|
|Motion in Open Loop (±10%)*||μm||200||–||–|
|Motion in Closed Loop (±0,2%)*||μm||–||160||160|
|Resolution Open Loop**||nm||0.4||–||–|
|Resolution Closed Loop**||nm||–||4||2|
|Dimensions (L x W x H)||mm||52 x 48 x 20||52 x 48 x 20||70.5 x 48 x 20|