PX 200

  • Accurate parallel motion
  • Motion range up to 200 µm
  • No mechanical play
  • Optional Integrated feedback sensor
  • Easily combined with other piezo electrical systems
  • Precision pin-holes for accurate adjustment
Add to quotation


The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play in the X and Z directions. They provide a much higher resolution than is possible with mechanical or electromechanical systems.

The PX 200 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with large degrees of freedom.

These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.

Technical Data

Part #T-106-00T-106-01T-106-06
Motion in Open Loop (±10%)*μm200
Motion in Closed Loop (±0,2%)*μm160160
Resolution Open Loop**nm0.4
Resolution Closed Loop**nm42
Dimensions (L x W x H)mm52 x 48 x 2052 x 48 x 2070.5 x 48 x 20
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

Related Products

PX 1500

show more

PX 500

show more

NV200/D Net Compact Amplifier

show more

PX 100

show more