PX 500

  • Long 500 µm range of motion
  • Control signal within -20 and 130 volts
  • Vacuum and cryogenic configurations available
  • Easy system integration
  • High dynamic range
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Description

The PX 500 linear actuator was developed especially for OEM applications. Without external loads, the piezoelectric element can reach a motion of 500 µm.

The PX 500 piezo flexure stage is especially suited for system integration due to its small dimension. The construction is based on solid-state hinges that provide a levered transmission of the piezo elements.

The PX 500 is ideally suited for micro-positioning optical components, such as mirrors and laser diodes, or for opening and closing micro fluid valves. 

The element can be mounted to a fixture using one of the holes (2.2 mm diameter). The other hole will move in relation to this one.

Technical Data

UNITPX 500
Part #S-605-89
AxisX
Motion in Open Loop (±10%)*μm500
Resolution Open Loop**nm1.2
Dimensions (L x W x H)mm52 x 20 x 8
Weightg14
*Typical value measured with a NV 40/3 amplifier **The resolution is only limited by the noise of the power amplifier and metrology.

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