- Long 500 µm range of motion
- Control signal within -20 and 130 volts
- Vacuum and cryogenic configurations available
- Easy system integration
- High dynamic range
The PX 500 linear actuator was developed especially for OEM applications. Without external loads, the piezoelectric element can reach a motion of 500 µm.
The PX 500 piezo flexure stage is especially suited for system integration due to its small dimension. The construction is based on solid-state hinges that provide a levered transmission of the piezo elements.
The PX 500 is ideally suited for micro-positioning optical components, such as mirrors and laser diodes, or for opening and closing micro fluid valves.
The element can be mounted to a fixture using one of the holes (2.2 mm diameter). The other hole will move in relation to this one.
|Motion in Open Loop (±10%)*||μm||500|
|Resolution Open Loop**||nm||1.2|
|Dimensions (L x W x H)||mm||52 x 20 x 8|