PX 400

  • Accurate parallel motion
  • Motion range up to 400 µm
  • No mechanical play
  • Optional Integrated feedback sensor
  • Easily combined with other piezo electrical systems
  • Precision pin-holes for accurate adjustment
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Description

The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play. They provide a much higher resolution than is possible with mechanical or electromechanical systems.

The PX 400 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with many degrees of freedom.

These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.

Technical Data

UNITPX 400PX 400 SGPX 400 CAP
Part #T-108-00T-108-01T108-06
AxisXXX
Motion in Open Loop (±10%)*μm400
Motion in Closed Loop (±0,2%)*μm320320
Resolution Open Loop**nm0.8
Resolution Closed Loop**nm84
Dimensions (L x W x H)mm52 x 48 x 2052 x 48 x 2070.7 x 48 x 20
Weightg175175210
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

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