- Accurate parallel motion
- Motion range up to 400 µm
- No mechanical play
- Optional Integrated feedback sensor
- Easily combined with other piezo electrical systems
- Precision pin-holes for accurate adjustment
The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play. They provide a much higher resolution than is possible with mechanical or electromechanical systems.
The PX 400 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with many degrees of freedom.
These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.
|UNIT||PX 400||PX 400 SG||PX 400 CAP|
|Motion in Open Loop (±10%)*||μm||400||–||–|
|Motion in Closed Loop (±0,2%)*||μm||–||320||320|
|Resolution Open Loop**||nm||0.8||–||–|
|Resolution Closed Loop**||nm||–||8||4|
|Dimensions (L x W x H)||mm||52 x 48 x 20||52 x 48 x 20||70.7 x 48 x 20|