PX products are single-axis positioning stages with a motion range up to 38 microns. Due to the nature of the solid state flexure and parallelogram construction, these stages are free of mechanical play.
Based on their compact size, they can be easily integrated into customer sized set-ups. The high performance of the piezo electrical stack type actuator is the basic feature for stage accuracy.
They are ideally suited for nanometer precise positioning of optical components such as mirrors and laser diodes, adjustment and mounting in semiconductor technologies and electronics, and applications in measurement technologies, quality assurance and microbiology.
| Series PX | UNIT | PX 38 | PX 38 SG |
|---|---|---|---|
| Part # | T-101-00 | T-101-01 | |
| Axis | X | X | |
| Motion in Open-Loop (±10%)* | μm | 39 | – |
| Motion in Closed-Loop (±0,2%)* | μm | – | 32 |
| Resolution Open-Loop** | nm | 0.07 | – |
| Resolution Closed-Loop** | nm | – | 0.7 |
| Dimensions (L x W x H) | mm | 25 x 25 x 18 | 40 x 40 x 25 |
| Weight | g | 40 | 77 |
