PX 38

  • Compact piezo-translation stage
  • Motion range up to 39 µm
  • Solid state hinges without mechanical play
  • Optional Integrated feedback sensor
  • Easily combined with other piezo systems (especially XY and tilting systems)
  • Precision pin holes for accurate adjustment
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PX 38 – Description

PX products are single-axis positioning stages with a motion range up to 38 microns. Due to the nature of the solid state flexure and parallelogram construction, these stages are free of mechanical play.

Based on their compact size, they can be easily integrated into customer sized set-ups. The high performance of the piezo electrical stack type actuator is the basic feature for stage accuracy.

They are ideally suited for nanometer precise positioning of optical components such as mirrors and laser diodes, adjustment and mounting in semiconductor technologies and electronics, and applications in measurement technologies, quality assurance and microbiology.

Technical Data

Series PXUNITPX 38PX 38 SG
Part #T-101-00T-101-01
Motion in Open-Loop (±10%)*μm39
Motion in Closed-Loop (±0,2%)*μm32
Resolution Open-Loop**nm0.07
Resolution Closed-Loop**nm0.7
Dimensions (L x W x H)mm25 x 25 x 1840 x 40 x 25
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

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