PZ 250 CAP WL

  • Positioning in millisecond range
  • Steps in the single-digit nanometer range
  • Stable positioning of a few nanometers
  • Very high repeatability
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Description

The PZ 250 CAP WL was developed for the precise positioning of semiconductor wafers with diameters up to 12”. In closed-loop operation the actuator offers motion in Z direction of 250 μm. Equipped with a capacitive sensor that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be held with high stability for a long periods. Due to its high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.

The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, and mask inspection.

Technical Data

UNITPZ 250 CAP WL
Part #S-627-51 D
AxisZ
Motion in Open Loop (±10%)*μm350
Motion in Closed Loop*μm250
Resolution**nm3
Dimensions (L x W x H)mm400 x 380 x 20
Weightg2500
*Typical value measured with a 30DV50 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

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