PZ 400 OEM
- Motion range up to 400 microns
- Accurate parallel motion
- Motion without mechanical play
- Easily combined with other piezoelectric components
- High dynamic due to mechanical pre-load
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PZ 400 OEM – Description
Due to solid state flexure and parallelogram construction, the PZ 400 OEM nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this z-axis nano-positioning stage can run dynamically.
The PZ 400 OEM can optionally be equipped with an integrated measurement system (strain gauge sensors) that compensates for hysteresis.
Technical Data
| UNIT | PZ 400 OEM | PZ 400 SG OEM | |
|---|---|---|---|
| Part # | S-628-00 | S-628-01 | |
| Axis | Z | Z | |
| Motion in Open-Loop (±10%)* | μm | 400 | 400 |
| Motion in Closed-Loop (±0,2%)* | μm | – | 320 |
| Resolution Open-Loop** | nm | 0.8 | 0.8 |
| Resolution Closed-Loop** | nm | – | 8 |
| Dimensions (L x W x H) | mm | 66 x 20 x 24 | 66 x 20 x 27.5 |
| Weight | g | 155 | 175 |
**The resolution is only limited by the noise of the power amplifier and metrology.
