PZ 400 OEM
- Motion range up to 400 microns
- Accurate parallel motion
- Motion without mechanical play
- Easily combined with other piezoelectrical systems
- High dynamic due to mechanical pre-load
Due to solid state flexure and parallelogram construction, the PZ 400 OEM nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this z-axis nano-positioning stage can run dynamically.
The PZ 400 OEM can optionally be equipped with an integrated measurement system (strain gauge sensors) that compensates for hysteresis.
|UNIT||PZ 400 OEM||PZ 400 SG OEM|
|Motion in Open Loop (±10%)*||μm||400||400|
|Motion in Closed Loop (±0,2%)*||μm||–||320|
|Resolution Open Loop**||nm||0.8||0.8|
|Resolution Closed Loop**||nm||–||8|
|Dimensions (L x W x H)||mm||66 x 20 x 24||66 x 20 x 27.5|