PZ 400 OEM

  • Motion range up to 400 microns
  • Accurate parallel motion
  • Motion without mechanical play
  • Easily combined with other piezoelectrical systems
  • High dynamic due to mechanical pre-load
Add to quotation

Description

Due to solid state flexure and parallelogram construction, the PZ 400 OEM nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this z-axis nano-positioning stage can run dynamically.

The PZ 400 OEM can optionally be equipped with an integrated measurement system (strain gauge sensors) that compensates for hysteresis.

Technical Data

UNITPZ 400 OEMPZ 400 SG OEM
Part #S-628-00S-628-01
AxisZZ
Motion in Open Loop (±10%)*μm400400
Motion in Closed Loop (±0,2%)*μm320
Resolution Open Loop**nm0.80.8
Resolution Closed Loop**nm8
Dimensions (L x W x H)mm66 x 20 x 2466 x 20 x 27.5
Weightg155175
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

Related Products

NV200/D Net Compact Amplifier

show more

TRITOR 400

show more