PZ 400 OEM

  • Motion range up to 400 microns
  • Accurate parallel motion
  • Motion without mechanical play
  • Easily combined with other piezoelectric components
  • High dynamic due to mechanical pre-load
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PZ 400 OEM – Description

Due to solid state flexure and parallelogram construction, the PZ 400 OEM nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this z-axis nano-positioning stage can run dynamically.

The PZ 400 OEM can optionally be equipped with an integrated measurement system (strain gauge sensors) that compensates for hysteresis.

Technical Data

UNITPZ 400 OEMPZ 400 SG OEM
Part #S-628-00S-628-01
AxisZZ
Motion in Open-Loop (±10%)*μm400400
Motion in Closed-Loop (±0,2%)*μm320
Resolution Open-Loop**nm0.80.8
Resolution Closed-Loop**nm8
Dimensions (L x W x H)mm66 x 20 x 2466 x 20 x 27.5
Weightg155175
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier).
**The resolution is only limited by the noise of the power amplifier and metrology.

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