PZ 400 OEM

  • Motion range up to 400 microns
  • Accurate parallel motion
  • Motion without mechanical play
  • Easily combined with other piezoelectric components
  • High dynamic due to mechanical pre-load
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PZ 400 OEM – Description

Due to solid state flexure and parallelogram construction, the PZ 400 OEM nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this z-axis nano-positioning stage can run dynamically.

The PZ 400 OEM can optionally be equipped with an integrated measurement system (strain gauge sensors) that compensates for hysteresis.

Technical Data

Part #S-628-00S-628-01
Motion in Open-Loop (±10%)*μm400400
Motion in Closed-Loop (±0,2%)*μm320
Resolution Open-Loop**nm0.80.8
Resolution Closed-Loop**nm8
Dimensions (L x W x H)mm66 x 20 x 2466 x 20 x 27.5
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier).
**The resolution is only limited by the noise of the power amplifier and metrology.

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