PZ 700

  • Motion range up to 700 microns
  • Highly accurate and fast for large masses
  • Motion without mechanical play
  • Easily combined with other piezo electrical systems
  • Inside aperture
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Description

The piezo positioner PZ 700 enables highly accurate positioning of the Z axis. The stage is driven by multilayer piezo ceramics. By using piezo ceramics in solid state flexure systems, motion without mechanical play is guaranteed. Based on its design the piezo positioner PZ 700 is pre-loaded and can be used dynamically.

The PZ 700 offers a large travel range of up to 700 µm and an inside aperture of 66 x 66 mm.

Technical Data

UNITPZ 700
Part #S-605-90
AxisZ
Motion in Open Loop (±10%)*μm700
Resolution Open Loop**nm1.4
Dimensions (L x W x H)mm120 x 112 x 28
Inside Aperturemm66 x 66
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

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