PZ 400

  • Motion range up to 200 microns
  • Accurate parallel motion
  • Motion without mechanical play
  • Easily combined with other piezo electrical systems
  • Precision pin holes for accurate adjustment
  • High dynamic due to mechanical pre-load
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Description

Due to solid state flexure and parallelogram construction, the PZ 400 nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this z-axis nano-positioning stage can run dynamically.

The PZ 400 can optionally be equipped with an integrated measurement system (strain gauge or capacitive sensors) that compensates for drift and hysteresis.

Technical Data

UNITPZ 400PZ 400 SG
Part #T-118-00T-118-01
AxisZZ
Motion in Open Loop (±10%)*μm400400
Motion in Closed Loop (±0,2%)*μm320
Resolution Open Loop**nm0.80.8
Resolution Closed Loop**nm8
Dimensions (L x W x H)mm52 x 48 x 28.552 x 48 x 28.5
Weightg155175
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

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