- Motion range up to 400 microns
- Accurate parallel motion
- Motion without mechanical play
- Easily combined with other piezo electrical systems
- Precision pin holes for accurate adjustment
- High dynamic due to mechanical pre-load
Due to solid state flexure and parallelogram construction, the PZ 400 nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.
The PZ 400 can optionally be equipped with an integrated measurement system (strain gauge or capacitive sensors) that compensates for drift and hysteresis.
|UNIT||PZ 400||PZ 400 SG|
|Motion in Open-Loop (±10%)*||μm||400||400|
|Motion in Closed-Loop (±0,2%)*||μm||–||320|
|Dimensions (L x W x H)||mm||52 x 48 x 28.5||52 x 48 x 28.5|