PZ 200
- Motion up to 200 microns
- Accurate parallel motion due to flexure guidance
- Motion without mechanical play
- Easily combined with other piezo electrical systems
- High dynamic due to mechanical pre-load
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Description
Due to solid state flexure and parallelogram construction, the PZ 200 nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.
The PZ 200 can optionally be equipped with a measurement system (strain gauge or capacitive sensors) that compensates for hysteresis.
Technical Data
| UNIT | PZ 200 | PZ 200 SG | |
|---|---|---|---|
| Part # | S-626-00 | S-626-01 | |
| Axis | Z | Z | |
| Motion in Open Loop (±10%)* | μm | 200 | 200 |
| Motion in Closed Loop (±0,2%)* | μm | – | 160 |
| Resolution Open Loop** | nm | 0.4 | 0.4 |
| Resolution Closed Loop** | nm | – | 4 |
| Dimensions (L x W x H) | mm | 50 x 16 x 17 | 50 x 16 x 21 |
| Weight | g | 140 | 165 |
