- Motion up to 200 microns
- Accurate parallel motion due to flexure guidance
- Motion without mechanical play
- Easily combined with other piezo electrical systems
- High dynamic due to mechanical pre-load
Due to solid state flexure and parallelogram construction, the PZ 200 nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.
The PZ 200 can optionally be equipped with a measurement system (strain gauge or capacitive sensors) that compensates for hysteresis.
|UNIT||PZ 200||PZ 200 SG|
|Motion in Open Loop (±10%)*||μm||200||200|
|Motion in Closed Loop (±0,2%)*||μm||–||160|
|Resolution Open Loop**||nm||0.4||0.4|
|Resolution Closed Loop**||nm||–||4|
|Dimensions (L x W x H)||mm||50 x 16 x 17||50 x 16 x 21|