PZ 200

  • Motion up to 200 microns
  • Accurate parallel motion due to flexure guidance
  • Motion without mechanical play
  • Easily combined with other piezoelectric systems
  • High dynamic due to mechanical pre-load
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PZ 200 – Description

Due to solid state flexure and parallelogram construction, the PZ 200 nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z axis nano-positioning stage can run dynamically.

The PZ 200 can optionally be equipped with a measurement system (strain gauge or capacitive sensors) that compensates for hysteresis.

Technical Data

Part #S-626-00S-626-01
Motion in Open-Loop (±10%)*μm200200
Motion in Closed-Loop (±0,2%)*μm160
Resolution Open-Loop**nm0.40.4
Resolution Closed-Loop**nm4
Dimensions (L x W x H)mm50 x 16 x 1750 x 16 x 21
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

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