PZ 38

  • Motion up to 38 microns
  • Integrated lever transmission
  • nm resolution
  • Easily adjustable
  • Integrated pre-load
  • Dynamic application
  • High resonant frequency
  • Easily combined with other stages
  • Vacuum compatible
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Description

Due to solid state flexure and parallelogram construction, the PZ 38 nano-positioning stage can travel without any mechanical play in the X and Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.

The PZ 38 can optionally be equipped with measurement systems (strain gauge or capacitive sensors) that compensate for hysteresis.

Technical Data

UNITPZ 38PZ 38 SGPZ 38 CAP
Part #T-102-00T-102-01T-102-06
AxisZZZ
Motion in Open Loop (±10%)*μm38
Motion in Closed Loop (±0,2%)*μm3232
Resolution Open Loop**nm0.08
Resolution Closed Loop**nm0.70.7
Dimensions (L x W x H)mm25 x 25 x 1840 x 40 x 2532 x 25 x 22
Weightg4077100
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

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