- Motion up to 38 microns
- Integrated lever transmission
- nm resolution
- Easily adjustable
- Integrated pre-load
- Dynamic application
- High resonant frequency
- Easily combined with other stages
- Vacuum compatible
Due to solid state flexure and parallelogram construction, the PZ 38 nano-positioning stage can travel without any mechanical play in the X and Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.
The PZ 38 can optionally be equipped with measurement systems (strain gauge or capacitive sensors) that compensate for hysteresis.
|UNIT||PZ 38||PZ 38 SG||PZ 38 CAP|
|Motion in Open-Loop (±10%)*||μm||38||–||–|
|Motion in Closed-Loop (±0,2%)*||μm||–||32||32|
|Dimensions (L x W x H)||mm||25 x 25 x 18||40 x 40 x 25||32 x 25 x 22|