PZ 38
- Motion up to 38 microns
- Integrated lever transmission
- nm resolution
- Easily adjustable
- Integrated pre-load
- Dynamic application
- High resonant frequency
- Easily combined with other stages
- Vacuum compatible
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PZ 38 – Description
Due to solid state flexure and parallelogram construction, the PZ 38 nano-positioning stage can travel without any mechanical play in the X and Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.
The PZ 38 can optionally be equipped with measurement systems (strain gauge or capacitive sensors) that compensate for hysteresis.
Technical Data
| UNIT | PZ 38 | PZ 38 SG | PZ 38 CAP | |
|---|---|---|---|---|
| Part # | T-102-00 | T-102-01 | T-102-06 | |
| Axis | Z | Z | Z | |
| Motion in Open-Loop (±10%)* | μm | 38 | – | – |
| Motion in Closed-Loop (±0,2%)* | μm | – | 32 | 32 |
| Resolution Open-Loop** | nm | 0.08 | – | – |
| Resolution Closed-Loop** | nm | – | 0.7 | 0.7 |
| Dimensions (L x W x H) | mm | 25 x 25 x 18 | 40 x 40 x 25 | 32 x 25 x 22 |
| Weight | g | 40 | 77 | 100 |
