PZ 38

  • Motion up to 38 microns
  • Integrated lever transmission
  • nm resolution
  • Easily adjustable
  • Integrated pre-load
  • Dynamic application
  • High resonant frequency
  • Easily combined with other stages
  • Vacuum compatible
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PZ 38 – Description

Due to solid state flexure and parallelogram construction, the PZ 38 nano-positioning stage can travel without any mechanical play in the X and Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.

The PZ 38 can optionally be equipped with measurement systems (strain gauge or capacitive sensors) that compensate for hysteresis.

Technical Data

Part #T-102-00T-102-01T-102-06
Motion in Open-Loop (±10%)*μm38
Motion in Closed-Loop (±0,2%)*μm3232
Resolution Open-Loop**nm0.08
Resolution Closed-Loop**nm0.70.7
Dimensions (L x W x H)mm25 x 25 x 1840 x 40 x 2532 x 25 x 22
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

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