• 3D nano-positioning stage
  • Compact design
  • Flexure hinge design without mechanical play
  • Motion range up to 38 µm
  • Ultra precise translation based on FEA-optimized parallelogram design
  • High resolution positioning
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TRITOR 38 – Description

The unique three-dimensional TRITOR 38 piezo stage, uses elements that are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 38 µm in all three axes can be realized. The resolution is in the sub-nm range.

The unique cube design of the nano flexure guiding system allows for excellent usability with zero friction. With a combination of high stiffness and excellent straightness of motion, the TRITOR 38 is ideal for high precision positioning in the nanometer range for fiber alignment, laser technique and other types of high accurate micro-positioning applications.

The TRITOR 38 can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to the design the TRITOR 38 is suitable for dynamic applications.

Technical Data

Part #T-402-00T-402-01
AxisX, Y, ZX, Y, Z
Motion in Open-Loop (±10%)*μm3838
Motion in Closed-Loop (±0.2%)*μm30
Resolution Open-Loop**nm0.070.8
Dimensions (L x W x H)mm25 x 25 x 2540 x 40 x 33.5
*Typical value measured with a NV 40/3 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

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