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MIPOS 16

Description

The MIPOS is specifically designed for high precision positioning of optical systems with accuracy in the sub-nanometer range. The high resolution and fast response time of the MIPOS 16 offer new possibilities, especially for white light interferometers.

Based on its unique design, which includes an aperture up to 104 mm and a stage height down to 42 mm, the MIPOS 16 offers technical specifications that match the requirements for white light interferometry. White light interferometry has become one of the most effective 3D surface measurement methods. Piezoelectric actuators are able to significantly improve accuracy and speed due to their virtually unlimited resolution and fast response time. The MIPOS 16 can achieve a focus range of up to 16 µm and a single step resolution of less than 0.1 nm, while operating in a voltage range between 20 and 130 V.

The MIPOS 16 is made for integration into metrology set-ups and devices. The robust drive is equipped with a high resolution piezo based actuating system. The internal mechanical pre-load design enables the MIPOS to operate in highly dynamic environments while reducing the settling time down to microseconds.

Technical Data

MIPOS SeriesUNITMIPOS 16-158MIPOS 16 M85
Part #O-309-50O-309-10
AxisZZ
Motion in Open Loop (±10%)*μm1616
Resolution Open Loop**nm0.040.04
Dimensions (L x W x H)mm158 x 4293 x 50
Weightg1240300
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

MIPOS 600 SG

Description

The systems of the MIPOS 600SG OEM series offer a nano-positioning and scanning range up to 600 µm in open loop operation, and 500 µm in closed loop. They can be assembled with objectives with a diameter of up to 40 mm.

Unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 600SG OEM can be guaranteed by the use of the integrated measurement system. The design which includes integrated pre-load of the actuator offers high resonant frequency and highly parallel motion, and is available in an upside-down version for inverted microscopes.

Due to the unique features of the MIPOS 600 series, fast scanning applications can be accurately realized with the shortest settling times.

Technical Data

Part NumberO-380-01D
AxisZ
Motion in Open Loop (±10%)*μm600
Motion in Closed Loop (±0,2%)*μm500
Resolution Open Loop**nm0.9
Resolution Closed Loop**nm12
Dimensions (L x W x H)mm60.5 x 50 x 40.1
Weightg370
*Typical value measured with a EVD125 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

MIPOS 500

Description

The systems of the MIPOS 500 series offer a nano-positioning and scanning range up to 500 µm in open loop operation, and 400 µm in closed loop. They can be assembled with objectives that have a diameter of up to 40 mm.

Parallelogram design guarantees high parallel motion without influencing the optical path. The precise positioning repeatability of the MIPOS 500 series can be guaranteed by the use of the optional integrated measurement system. The design includes an integrated pre-load of the actuator that offers high resonant frequency and highly parallel motion – and is available in an upside-down version for inverted microscopes.

Due to the unique features of the MIPOS 500 series, fast scanning applications can be accurately realized with the shortest settling times.

Technical Data

MIPOS SeriesUNITMIPOS 500MIPOS 500 UDMIPOS 500 SGMIPOS 500 SG UD
Part # for threadM25 x 0.75O-350-00O-360-00O-350-01O-360-01
W0.8 x 1/36″ (RMS)O-354-00O-364-00O-354-01O-364-01
M26 x 0.75O-355-00O-365-00O-355-01O-365-01
M27 x 0.75O-356-00O-366-00O-356-01O-366-01
M32x0.75O-357-00O-367-00O-357-01O-367-01
AxisZZZZ
Motion in Open Loop (±10%)*μm500500500500
Motion in Closed Loop (±0,2%)*μm400400
Resolution Open Loop**nm0.90.90.90.9
Resolution Closed Loop**nm1212
Dimensions (L x W x H)mm60.5 x 50 x 36.460.2 x 50 x 35.560.5 x 50 x 40.162 x 50 x 41.5
Weightg370370370370
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

nanoMIPOS 400

Description

The nanoMIPOS offers a nano-positioning and scanning range up to 400 µm in open loop operation, as well as 320 µm in closed loop. The system can be assembled with objectives of up to 39 mm in diameter.

The sophisticated monolithic guidance design, consisting of solid flexure hinges, means the trajectory is free of mechanical play and friction – a feature offered by all piezosystem jena stages.

The advanced nanoMIPOS 400 design is FEA optimized to show an outstanding minimum of lateral and rotational offset, as well as excellent guidance accuracy, while offering robustness against off center and lateral loads.

To avoid drift and hysteresis, the nanoMIPOS 400 can be equipped with a capacitive measurement system. In combination with the piezosystem jena controller, this system offers high stability, linearity, repeatability and accuracy in closed loop operation.

Technical Data

MIPOS SeriesUNITnanoMIPOS 400nanoMIPOS CAP
Part # for threadM25 x 0.75O-543-00O-543-06
W0.8 x 1/36″ (RMS)O-544-00O544-06
M26 x 0.75O-545-00O-545-06
M27 x 0.75O-546-00O-546-06
M32x0.75O-547-00O-547-06
AxisZZ
Motion in Open Loop (±10%)*μm400400
Motion in Closed Loop (±0,2%)*μm320
Resolution Open Loop**nm0.80.8
Resolution Closed Loop**nm1
Dimensions (L x W x H)mm65 x 45 x 4065 x 45 x 40
Weightg300315
*Typical value measured with a 30DV50 nanoX amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

MIPOS 250

Description

The piezo focus positioner MIPOS 250 was developed for finely adjusting micro objectives and object lenses. The maximum motion is 250 µm. The resolution of the MIPOS 250 is very high, and in practice only limited by the voltage noise of the power supply.

All kinds of standard threads for Zeiss, Leica, Nikon, Olympus etc. are available for the top and bottom sides of the MIPOS system. Mounting this system onto the microscope is very easy – screw the Flex-Adapter thread ring into the microscope and mount the MIPOS 250 for piezo focus fine adjustment on this ring with a screw. Because of the small size, no other threads beside the MIPOS are blocked.

To avoid drift and hysteresis, there is the option of equipping the MIPOS with an integrated strain gauge measurement system “SG”. And, the MIPOS 250 can be used in inverse microscopes – upside down.

Technical Data

MIPOS SeriesUNITMIPOS 250MIPOS 250 SGMIPOS 250 CAP
part # for threadM25 x 0.75O-370-00O-370-01O-370-06
W0.8 x 1/36″ (RMS)O-374-00O-374-01O-374-06
M26 x 0.75O-375-00O-375-01O-375-06
M27 x 0.75O-376-00O-376-01O-376-06
M32x0.75O-377-00O-377-01O-377-06
AxisZZZ
Motion in open loop (±10%)*μm250250250
Motion in closed loop (±0,2%)*μm200200
Resolution Open Loop**nm0.50.50.5
Resolution Closed Loop**nm5.01.0
Dimensions (L x W x H)mm60.7 x 50 x 23.560.5 x 50 x 35.360.2 x 50 x 34.5
Weightg255255350
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.