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MIPOS 600 SG

MIPOS 600 SG – Description

The MIPOS 600 SG offers a nanopositioning and scanning range up to 600 µm in open-loop operation, and 500 µm in closed-loop using a strain-gauge sensor. It can be used with objectives that have a diameter of up to 40 mm.

Unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 600 SG can be guaranteed by the use of the strain-gauge integrated measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and highly parallel motion.

Due to the unique features of the MIPOS 600 SG, fast scanning applications can be accurately realized with short settling times.

Technical Data

UnitMIPOS 600 SG
Part NumberO-380-01D
AxisZ
Motion in Open-Loop (±10%)*μm600
Motion in Closed-Loop (±0,2%)*μm500
Resolution Open-Loop**nm0.9
Resolution Closed-Loop**nm12
Dimensions (L x W x H)mm60.5 x 50 x 40.1
Weightg370
*Typical values measured with a 0.7 mV controller. **The resolution is only limited by the noise of the power amplifier and metrology.

MIPOS 16

MIPOS 16 – Description

The MIPOS is specifically designed for high precision positioning of optical systems with accuracy in the sub-nanometer range. The high resolution and fast response time of the MIPOS 16 offer new possibilities, especially for white light interferometers.

Based on its unique design, which includes an aperture up to 104 mm and a stage height down to 42 mm, the MIPOS 16 offers technical specifications that match the requirements for white light interferometry. White light interferometry has become one of the most effective 3D surface measurement methods. Piezoelectric actuators are able to significantly improve accuracy and speed due to their virtually unlimited resolution and fast response time. The MIPOS 16 can achieve a focus range of up to 16 µm and a single step resolution of less than 0.1 nm, while operating in a voltage range between 20 and 130 V.

The MIPOS 16 is made for integration into metrology set-ups and devices. The robust drive is equipped with a high resolution piezo based actuating system. The internal mechanical pre-load design enables the MIPOS to operate in highly dynamic environments while reducing the settling time down to microseconds.

Technical Data

MIPOS SeriesUNITMIPOS 16-158MIPOS 16 M85
Part #O-309-50O-309-10
AxisZZ
Motion in Open-Loop (±10%)*μm1616
Resolution Open-Loop**nm0.040.04
Dimensions (L x W x H)mm158 x 4293 x 50
Weightg1240300
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

MIPOS 800

MIPOS 800 – Description

The MIPOS 800 objective positioner offers a nanopositioning scanning range up to 800 µm in open-loop operation, and 650 µm in closed-loop operation. The positioner can be used with objectives that have a diameter up to 40 mm.

A unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 800 can be guaranteed by the use of the integrated strain-gauge measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and a highly parallel motion.

Due to the unique design of the MIPOS 800, fast scanning applications can be accurately realized with short settling times.

Technical Data

UnitMIPOS 800MIPOS 800 SG
Part NumberO-380-50DO-380-53D
AxisZZ
Motion in Open-Loop (±10%)*μm800800
Motion in Closed-Loop (±0,2%)*μm650
Resolution Open-Loop**nm11
Resolution Closed-Loop**nm12
Dimensions (L x W x H)mm76 x 56 x 4976 x 56 x 49
Weightg350360
*Typical values measured with a 0.7 mV controller. **The resolution is only limited by the noise of the power amplifier and metrology.

MIPOS 500

MIPOS 500 Description

The systems of the MIPOS 500 series offer a nano-positioning and scanning range up to 500 µm in open-loop operation, and 400 µm in closed-loop. They can be assembled with objectives that have a diameter of up to 40 mm.

Parallelogram design guarantees high parallel motion without influencing the optical path. The precise positioning repeatability of the MIPOS 500 series can be guaranteed by the use of the optional integrated measurement system. The design includes an integrated pre-load of the actuator that offers high resonant frequency and highly parallel motion – and is available in an upside-down version for inverted microscopes.

Due to the unique features of the MIPOS 500 series, fast scanning applications can be accurately realized with the shortest settling times.

Technical Data

MIPOS SeriesUNITMIPOS 500MIPOS 500 UDMIPOS 500 SGMIPOS 500 SG UD
Part # for threadM25 x 0.75O-350-00O-360-00O-350-01O-360-01
W0.8 x 1/36″ (RMS)O-354-00O-364-00O-354-01O-364-01
M26 x 0.75O-355-00O-365-00O-355-01O-365-01
M27 x 0.75O-356-00O-366-00O-356-01O-366-01
M32x0.75O-357-00O-367-00O-357-01O-367-01
AxisZZZZ
Motion in Open-Loop (±10%)*μm500500500500
Motion in Closed-Loop (±0,2%)*μm400400
Resolution Open-Loop**nm0.90.90.90.9
Resolution Closed-Loop**nm1212
Dimensions (L x W x H)mm60.5 x 50 x 36.460.2 x 50 x 35.560.5 x 50 x 40.162 x 50 x 41.5
Weightg370370370370
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

nanoMIPOS 400

nanoMIPOS 400 – Description

This nanoMIPOS offers a nano-positioning and scanning range up to 400 µm in open-loop operation, as well as 320 µm in closed-loop. The system can be assembled with objectives of up to 39 mm in diameter.

The sophisticated monolithic guidance design, consisting of solid flexure hinges, means the trajectory is free of mechanical play and friction – a feature offered by all piezosystem jena stages.

The advanced nanoMIPOS 400 design is FEA optimized to show an outstanding minimum of lateral and rotational offset, as well as excellent guidance accuracy, while offering robustness against off center and lateral loads.

To avoid drift and hysteresis, the nanoMIPOS 400 can be equipped with a capacitive measurement system. In combination with the piezosystem jena controller, this system offers high stability, linearity, repeatability and accuracy in closed loop operation.

Technical Data

MIPOS SeriesUNITnanoMIPOS 400nanoMIPOS CAP
Part # for threadM25 x 0.75O-543-00O-543-06
W0.8 x 1/36″ (RMS)O-544-00O544-06
M26 x 0.75O-545-00O-545-06
M27 x 0.75O-546-00O-546-06
M32x0.75O-547-00O-547-06
AxisZZ
Motion in Open-Loop (±10%)*μm400400
Motion in Closed-Loop (±0,2%)*μm320
Resolution Open-Loop**nm0.80.8
Resolution Closed-Loop**nm1
Dimensions (L x W x H)mm65 x 45 x 4065 x 45 x 40
Weightg300315
*Typical value measured with a 30DV50 nanoX amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.