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TRITOR 320

Description

The capability to move loads up to 20 kg make the TRITOR 320 one of the most robust piezo driven 3D positioning stages available on the market. The stage can be equipped with an integrated feedback sensors for closed loop control. The unique design of the flexure hinges allow for excellent usability with zero friction.

High stiffness, in combination with excellent straightness of motion, makes the TRITOR 320 ideal for high precision positioning in the nanometer range of heavy objects such as wafer chucks, bonding tools, and pick & place platforms.

Piezoelectrical actuators can act much faster, and with a higher accuracy to a signal change, than any motorized drive available. The resolutions of piezoelectrical actuators are only limited by the signal noise of the control system. Therefore, these piezo solutions are an excellent choice for positioning applications in fiber alignment, optics, wafer handling, medical equipment, etc. Each axis can be controlled separately in closed loop mode. An integrated sensor system is an available option that guarantees accuracy in the nanometer range.

Dynamic scan applications are a typical utilization of TRITOR stages. The simultaneous motion, available in X, Y and Z directions, offers a large degree of freedom. All stages of the TRITOR series can be made with special materials for unique vacuum or cryogenic applications.

Technical Data

UNITTRITOR 320TRITOR 320 CAP
Part #T-406-70T-406-76
AxesX, Y, ZX, Y, Z
Motion in Open Loop (±10%)*μm50/50/40050/50/400
Motion in Closed Loop*μm40/40/320
Resolution** (Open Loop Mode)nm0.1/0.1/0.80.1/0.1/0.8
Resolution** (Closed Loop Mode)nm1
Dimensions (L x W x H)mm320 x 320 x 55320 x 320 x 55
Weightg80008000
*Typical value measured with a d-Drive amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

TRITOR 400

Description

The TRITOR 400 has a parallel XYZ motion range of 400 µm per axis. The unique cube design of the flexure guiding system allows for excellent usability with zero friction. With a combination of high stiffness and excellent straightness of motion, the three-axis piezo positioner TRITOR 400 is an ideal solution for high precision positioning in the nanometer range for fiber alignment, laser-use, and many other micro-positioning tasks.

Dynamic scan applications are a typical utilization for the TRITOR 400. The simultaneous motion available in X,Y and Z directions, offers large degrees of freedom during use. All piezo stages can be made with special materials for specialized applications such as vacuum or cryogenic applications.

Through-holes are used for attaching the positioning system which is important for all dynamic applications. On the top plate there are pin holes and threaded holes for the mounting of external components. The three dimensional piezo elements are built with reliable piezo-stack actuators. The TRITOR 400 includes flexible insulation that is well suited for high dynamic applications.

Technical Data

UNITTRITOR 400TRITOR 400 SGTRITOR 400 CAP
Part #T-406-00T-406-01T-406-06
AxisX, Y, ZX, Y, ZX, Y, Z
Motion in Open Loop (±10%)*μm400400400
Motion in Closed Loop (±0.2%)*μm320320
Resolution in Open Loop**nm0.80.80.8
Resolution in Closed Loop**nm351
Dimensions (L x W x H)mm116 x 106 x 40116.6 x 106.5 x 40116 x 106 x 40
Weightg105010501100
*Typical value measured with a NV 40/3 CLE amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

TRITOR 101 and 102

Description

The TRITOR 101 and the TRITOR 102 are extremely compact solutions that offer motions up to 100 μm in X, Y and Z directions. The unique cube-like mechanical design allows motion without play. They are well suited for many applications from optical research to incorporation into OEM systems.

Probe alignment with microscopes usually requires an open center area for the passage of light. The 3D piezo stage models TRITOR 101 and 102 with their central apertures of 30 mm and 40 mm were developed considering such applications. High stiffness, in combination with excellent straightness of motion, makes the TRITOR series ideal for high precision in the nanometer range for optics, laser–use, and any other type of high resolution positioning applications.

Technical Data

UNITTRITOR 101TRITOR 101 SGTRITOR 102TRITOR 102 SG
Part #T-404-00T-404-01T-405-00T-405-01
AxisX, Y, ZX, Y, ZX, Y, ZX, Y, Z
Motion in Open Loop (±10%)*μm100100100100
Motion in Closed Loop*μm8080
Resolution**nm0.220.22
Dimensions (L x W x H)mm68 x 68 x 3068 x 68 x 3080 x 80 x 3080 x 80 x 30
Weightg480570520610
*Typical value measured with a NV 40/3 CLE amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

TRITOR 100

Description

The TRITOR 100 has a parallel X, Y and Z motion range of 100 µm per axis. The unique cube design of the flexure guiding system allows for excellent usability with zero friction. With a combination of high stiffness and excellent straightness of motion, the three-axes piezo positioner TRITOR 100 is an ideal solution for high precision positioning in the nanometer range for fiber alignment, laser-uses, and many other micro positioning tasks.

Dynamic scan applications are a typical utilization for the TRITOR 100. The simultaneous motion available in X, Y and Z directions, offers large degrees of freedom during use. All piezo stages can be made with special materials for specialized applications such as vacuum or cryogenic applications.

Through-holes are used for attaching the positioning system which is important for all dynamic applications. On the top plate there are several pin holes and threaded holes for the mounting of external components. The three dimensional piezo elements are built with reliable piezo-stack actuators. The TRITOR 100 includes flexible insulation that is well suited for high dynamic applications.

Technical Data

UNITTRITOR 100TRITOR 100 SGTRITOR 100 CAP
Part #T-403-00T-403-21T-403-06
AxisX, Y, ZX, Y, ZX, Y, Z
Motion in Open Loop (±10%)*μm100100100
Motion in Closed Loop (±0.2%)*μm8080
Resolution**nm0.22.01.0
Dimensions (L x W x H)mm40 x 40 x 3440 x 40 x 3460 x 60 x 41
Weightg165160550
*Typical value measured with a NV 40/3 CLE amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

TRITOR 38

Description

The unique three-dimensional TRITOR 38 piezo stage, uses elements that are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 38 µm in all three axes can be realized. The resolution is in the sub-nm range.

The unique cube design of the nano flexure guiding system allows for excellent usability with zero friction. With a combination of high stiffness and excellent straightness of motion, the TRITOR 38 is ideal for high precision positioning in the nanometer range for fiber alignment, laser technique and other types of high accurate micro-positioning applications.

The TRITOR 38 can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to the design the TRITOR 38 is suitable for dynamic applications.

Technical Data

UNITTRITOR 38TRITOR 38 SG
Part #T-402-00T-402-01
AxisX, Y, ZX, Y, Z
Motion in Open Loop (±10%)*μm3838
Motion in Closed Loop (±0.2%)*μm30
Resolution Open Loop**nm0.070.8
Dimensions (L x W x H)mm25 x 25 x 2540 x 40 x 33.5
Weightg115130
*Typical value measured with a NV 40/3 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.