miniTRITOR – Description
The unique three-dimensional miniTRITOR piezo stage, uses elements that are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 38 µm in all three axes can be realized. The resolution is in the sub-nm range.
The miniTRITOR can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to its design the miniTRITOR is suitable for dynamic applications.
Technical Data
| UNIT | miniTRITOR | |
|---|---|---|
| Part # | T-401-00 | |
| Axis | X, Y, Z | |
| Motion in Open-Loop (±10%)* | μm | 38 |
| Resolution Open-Loop** | nm | 0.07 |
| Dimensions (L x W x H) | mm | 19 x 19 x 16 |
| Weight | g | 57 |
