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TRITOR 38

TRITOR 38 – Description

The unique three-dimensional TRITOR 38 piezo stage, uses elements that are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 38 µm in all three axes can be realized. The resolution is in the sub-nm range.

The unique cube design of the nano flexure guiding system allows for excellent usability with zero friction. With a combination of high stiffness and excellent straightness of motion, the TRITOR 38 is ideal for high precision positioning in the nanometer range for fiber alignment, laser technique and other types of high accurate micro-positioning applications.

The TRITOR 38 can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to the design the TRITOR 38 is suitable for dynamic applications.

Technical Data

UNITTRITOR 38TRITOR 38 SG
Part #T-402-00T-402-01
AxisX, Y, ZX, Y, Z
Motion in Open-Loop (±10%)*μm3838
Motion in Closed-Loop (±0.2%)*μm30
Resolution Open-Loop**nm0.070.8
Dimensions (L x W x H)mm25 x 25 x 2540 x 40 x 33.5
Weightg115130
*Typical value measured with a NV 40/3 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

miniTRITOR

miniTRITOR – Description

The unique three-dimensional miniTRITOR piezo stage, uses elements that are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 38 µm in all three axes can be realized. The resolution is in the sub-nm range.

The miniTRITOR can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to its design the miniTRITOR is suitable for dynamic applications.

Technical Data

UNITminiTRITOR
Part #T-401-00
AxisX, Y, Z
Motion in Open-Loop (±10%)*μm38
Resolution Open-Loop**nm0.07
Dimensions (L x W x H)mm19 x 19 x 16
Weightg57
*Typical value measured with a NV 40/3 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

microTRITOR

microTRITOR – Description

The unique three-dimensional microTRITOR piezo stage, uses elements that are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 9 µm in all three axes can be realized. The resolution is in the sub-nm range.

The microTRITOR can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to its design the microTRITOR is suitable for dynamic applications.

Technical Data

UNITmicroTRITOR
Part #T-400-00
AxisX, Y, Z
Motion in Open-Loop (±10%)*μm9
Resolution Open-Loop**nm0.02
Dimensions (L x W x H)mm15 x 15 x 15
Weightg12
*Typical value measured with a NV 40/3 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

PXY 200 D12

PXY 200 D12 – Description

The piezo positioning PXY 200 D12 stage was developed for STM and AFM applications. This nano-positioner is optimized for high resonant frequencies and high stiffness in both axes. It was designed for typical line scanning applications, where quick and precise line movements and positioning is required.

The short settling time after a jump or a change of position was a key design goal. Piezo based electrical actuators and piezo-mechanic stages are well known for high resolution movement and long term positioning stability.

For special applications, the nanopositioner can be optimized for minimum deviation in the Z direction while moving in the X and Y directions.

Technical Data

UNITPXY 200 D12PXY 200 D12 SGPXY 200 D12 CAP
Part #S-605-20S-605-21S-605-26
AxisX, YX, YX, Y
Motion in Open-Loop (±10%)*μm200200200
Motion in Closed-Loop (±0.2%)*μm160160
Resolution Open-Loop**nm0.4
Resolution Closed-Loop**nm41
Dimensions (L x W x H)mm57.5 x 64 x 1657.5 x 64 x 1675.5 x 69 x 27
Weightg160160225
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier). **The resolution is only limited by the noise of the power amplifier and metrology.

PXY 80 D12

PXY 80 D12 – Description

The piezo positioning PXY 80 D12 stage was developed for STM and AFM applications. This nano-positioner is optimized for high resonant frequencies and high stiffness in both axes. It is designed for typical line scanning applications, where quick and precise line movements and positioning is required.

The short settling time after a jump or a change of position was a key design goal. Piezo based electrical actuators and piezo-mechanic stages are well known for high resolution movement and long term positioning stability.

For special applications, the nano-positioner can be optimized for minimum deviation in the Z direction while moving in the X and Y directions.

Technical Data

UNITPXY 80 D12PXY 80 D12 SGPXY 80 D12 CAP
Part #S-605-10S-605-14S-605-16
AxisX, YX, YX, Y
Motion in Open-Loop (±10%)*μm808080
Motion in Closed-Loop (±0.2%)*μm6565
Resolution Open-Loop**nm0.16
Resolution Closed-Loop**nm1.61
Dimensions (L x W x H)mm54 x 53.5 x 1654 x 53.5 x 1664 x 63.5 x 22
Weightg9090155
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier). **The resolution is only limited by the noise of the power amplifier and metrology.