PXY 80 D12

  • High resolution X Y positioning
  • Up to 80 µm motion range (open loop)
  • Optimized for minimum Z motion
  • High dynamic range
  • With Z axis actuator extension for XYZ Scanner systems
  • Optional high resolution feedback sensor
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Description

The piezo positioning PXY 80 D12 stage was developed for STM and AFM applications. This nano-positioner is optimized for high resonant frequencies and high stiffness in both axes. It was designed for typical line scanning applications, where quick and precise line movements and positioning is required.

The short settling time after a jump or a change of position was a key design goal. Piezo based electrical actuators and piezo-mechanic stages are well known for high resolution movement and long term positioning stability.

For special applications, the nano-positioner can be optimized for minimum deviation in the Z direction while moving in the X and Y directions.

Technical Data

UNITPXY 80 D12PXY 80 D12 SGPXY 80 D12 CAP
Part #S-605-10S-605-14S-605-16
AxisX, YX, YX, Y
Motion in Open Loop (±10%)*μm808080
Motion in Closed Loop (±0.2%)*μm6565
Resolution Open Loop**nm0.16
Resolution Closed Loop**nm1.61
Dimensions (L x W x H)mm54 x 53.5 x 1654 x 53.5 x 1664 x 63.5 x 22
Weightg9090155
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier). **The resolution is only limited by the noise of the power amplifier and metrology.

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