PXY 80 D12

  • High resolution X and Y positioning
  • Up to 80 µm motion range (open-loop)
  • Optimized for minimum Z motion
  • High dynamic range
  • With Z axis actuator extension for XYZ Scanner systems
  • Optional high resolution feedback sensor
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PXY 80 D12 – Description

The piezo positioning PXY 80 D12 stage was developed for STM and AFM applications. This nano-positioner is optimized for high resonant frequencies and high stiffness in both axes. It is designed for typical line scanning applications, where quick and precise line movements and positioning is required.

The short settling time after a jump or a change of position was a key design goal. Piezo based electrical actuators and piezo-mechanic stages are well known for high resolution movement and long term positioning stability.

For special applications, the nano-positioner can be optimized for minimum deviation in the Z direction while moving in the X and Y directions.

Technical Data

Part #S-605-10S-605-14S-605-16
AxisX, YX, YX, Y
Motion in Open-Loop (±10%)*μm808080
Motion in Closed-Loop (±0.2%)*μm6565
Resolution Open-Loop**nm0.16
Resolution Closed-Loop**nm1.61
Dimensions (L x W x H)mm54 x 53.5 x 1654 x 53.5 x 1664 x 63.5 x 22
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier). **The resolution is only limited by the noise of the power amplifier and metrology.

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