PXY 200 D12

  • High resolution X Y positioning
  • Up to 200 µm motion range (open loop)
  • Optimized for minimum Z motion
  • High dynamic range
  • With Z axis actuator extension for XYZ Scanner systems
  • Optional high resolution feedback sensor
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Description

The piezo positioning PXY 200 D12 stage was developed for STM and AFM applications. This nanopositioner is optimized for high resonant frequencies and high stiffness in both axes. It was designed for typical line scanning applications, where quick and precise line movements and positioning is required.

The short settling time after a jump or a change of position was a key design goal. Piezo based electrical actuators and piezo-mechanic stages are well known for high resolution movement and long term positioning stability.

For special applications, the nanopositioner can be optimized for minimum deviation in the Z direction while moving in the X and Y directions.

Technical Data

UNITPXY 200 D12PXY 200 D12 SGPXY 200 D12 CAP
Part #S-605-20S-605-21S-605-26
AxisX, YX, YX, Y
Motion in Open Loop (±10%)*μm200200200
Motion in Closed Loop (±0.2%)*μm160160
Resolution Open Loop**nm0.4
Resolution Closed Loop**nm41
Dimensions (L x W x H)mm57.5 x 64 x 1657.5 x 64 x 1675.5 x 69 x 27
Weightg160160225
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier). **The resolution is only limited by the noise of the power amplifier and metrology.

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