PXY 200 D12
- High resolution X Y positioning
- Up to 200 µm motion range (open loop)
- Optimized for minimum Z motion
- High dynamic range
- With Z axis actuator extension for XYZ Scanner systems
- Optional high resolution feedback sensor
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Description
The piezo positioning PXY 200 D12 stage was developed for STM and AFM applications. This nanopositioner is optimized for high resonant frequencies and high stiffness in both axes. It was designed for typical line scanning applications, where quick and precise line movements and positioning is required.
The short settling time after a jump or a change of position was a key design goal. Piezo based electrical actuators and piezo-mechanic stages are well known for high resolution movement and long term positioning stability.
For special applications, the nanopositioner can be optimized for minimum deviation in the Z direction while moving in the X and Y directions.
Technical Data
| UNIT | PXY 200 D12 | PXY 200 D12 SG | PXY 200 D12 CAP | |
|---|---|---|---|---|
| Part # | S-605-20 | S-605-21 | S-605-26 | |
| Axis | X, Y | X, Y | X, Y | |
| Motion in Open Loop (±10%)* | μm | 200 | 200 | 200 |
| Motion in Closed Loop (±0.2%)* | μm | – | 160 | 160 |
| Resolution Open Loop** | nm | 0.4 | – | – |
| Resolution Closed Loop** | nm | – | 4 | 1 |
| Dimensions (L x W x H) | mm | 57.5 x 64 x 16 | 57.5 x 64 x 16 | 75.5 x 69 x 27 |
| Weight | g | 160 | 160 | 225 |
