Series P and Series PHL piezo actuators are stack type actuators built in a multi-layer technique. PHL actuators are high-load. These P and PHL actuators both come without a pre-load, but they can still withstand a medium pressure force. PHL actuators are designed for high-load applications.
These piezo actuators are encased in a stainless steel housing.
P and PHL series actuators should be fastened with screws or clamps on the actuator’s bottom plate. These actuators are not designed for dynamic applications.
Technical Data
(See Datasheet PDFs below this chart for the complete list of all product variations)
4 Example Products
UNIT
P 8/8
P 80/10
PHL 18/20
PHL 100/20
Part #
P-101-00
P-117-00
P-141-00
P-145-00
Motion (-10%/+20%)*
μm
9
82
20
103
Capacitance (±20%)**
μF
0.18
7.2
7
34
Stiffness
N/μm
22
10
175
35
Resolution***
nm
0.02
0.16
0.04
0.21
Dimensions – L
mm
17
91
36
108
Diameter
mm
8
10
20
20
*Typical value measured with a NV 40/3 amplifier. ** Typical value for small signal strength. **The resolution is only limited by the noise of the power amplifier.
Series N piezo actuators are made for industrial applications. They consist of a large number of contacted ceramic discs. The electrodes are arranged on both sides of the ceramic discs. They are specially shielded by a flexible insulation material which guarantees the highest possible dynamic performance under the toughest requirements. Based on their design, they are well suited for easy integration into specific customer systems. Special designs are made with a centrically drilled hole.
The special flexible polymer insulation guarantees the highest performance for long term applications. It gives the PZT piezo actuators proven protection against various and harsh environments. The advantage of a flexible insulation versus brittle ceramic insulation is a longer lifetime. Results show that piezo electric actuators have worked, and continue to work, under extreme conditions for over 20 years. The insulation is also suitable for use in cryogenic and vacuum environments. Additional thermal shrink tube insulation protects the cable connection point on the ceramic.
It is important not to subject the actuator tip to non-axial forces during a manufacturing process and use. The PZT multilayer stacks are not preloaded. An external preload is applied when used in dynamic applications or in applications with high acceleration forces.
The standard cable length is 100 mm. As an option, flat tungsten carbide or ball tip end plates are available. Please note that when using these actuators under cryogenic conditions (4 K), only 10% of the standard motion is available.
The Series N piezo actuators have been successfully working for more than 20 years in a vast number of applications in the fields of nano-metrology, semiconductor, material sciences and scanning applications.
Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
N 2/5
N 25/S3.5
N 100/S5
N 120/S10
Part #
P-211-00
P-217-40
P-207-40
P-237-40
Motion (±10%)*
μm
2
30
103
123
Capacitance (±20%)**
μF
0.1
1.2
9.0
36.4
Stiffness
N/μm
250
14
8
28
Resolution***
nm
0.004
0.06
0.2
0.25
Dimensions – L x W x H
mm
L = 5
27 x 5.5 x 7.5
108 x 7 x 9
108 x 12 x 14
Diameter
mm
5
–
–
–
*Typical value measured with a NV 40/3 amplifier. ** Typical value for small signal strength. **The resolution is only limited by the noise of the power amplifier.
Optical stages often require an open aperture for passing light through. The PENTOR translation and tilting system was developed with a 17 mm free center hole for such applications. It offers motion in X, Y and Z directions of 100 µm, and a tilt of ±2 mrad on two orthogonal axes.
Flexure hinges for the three translation axes guarantee the highest degree of parallelism over the travel range of this stage. Each axis has a integrated mechanical preload, making the 5-axis piezo positioner PENTOR, very well suited for dynamic applications. The tilting is designed for plus-minus tilting.
The construction is temperature compensated so that changes in the surrounding temperature do not affect the tilting angle. The mirror mounts are preloaded, and are characterized by high stiffness and resonant frequency – and dynamic operation is possible.
The primary components constructed with solid state flexure hinges are made from stainless steel. The bottom and top plates are made from black anodized aluminum.
As an option, the 5-axis PENTOR can be outfitted with an integrated strain gauge measurement system.
The TRITOR 400 has a parallel XYZ motion range of 400 µm per axis. The unique cube design of the flexure guiding system allows for excellent usability with zero friction. With a combination of high stiffness and excellent straightness of motion, the three-axis piezo positioner TRITOR 400 is an ideal solution for high precision positioning in the nanometer range for fiber alignment, laser-use, and many other micro-positioning tasks.
Dynamic scan applications are a typical utilization for the TRITOR 400. The simultaneous motion available in X,Y and Z directions, offers large degrees of freedom during use. All piezo stages can be made with special materials for specialized applications such as vacuum or cryogenic applications.
Through-holes are used for attaching the positioning system which is important for all dynamic applications. On the top plate there are pin holes and threaded holes for the mounting of external components. The three dimensional piezo elements are built with reliable piezo-stack actuators. The TRITOR 400 includes flexible insulation that is well suited for high dynamic applications.
Technical Data
UNIT
TRITOR 400
TRITOR 400 SG
TRITOR 400 CAP
Part #
T-406-00
T-406-01
T-406-06
Axis
X, Y, Z
X, Y, Z
X, Y, Z
Motion in Open-Loop (±10%)*
μm
400
400
400
Motion in Closed-Loop (±0.2%)*
μm
–
320
320
Resolution in Open-Loop**
nm
0.8
0.8
0.8
Resolution in Closed-Loop**
nm
–
35
1
Dimensions (L x W x H)
mm
116 x 106 x 40
116.6 x 106.5 x 40
116 x 106 x 40
Weight
g
1050
1050
1100
*Typical value measured with a NV 40/3 CLE amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.
The TRITOR 101 and the TRITOR 102 are extremely compact solutions that offer motion up to 100 μm in X, Y and Z directions. The unique cube-like mechanical design allows motion without play. They are well suited for many applications from optical research to incorporation into OEM systems.
Probe alignment with microscopes usually requires an open center area for the passage of light. The 3D piezo stage models TRITOR 101 and 102 with their central apertures of 30 mm and 40 mm were developed considering such applications. High stiffness, in combination with excellent straightness of motion, makes the TRITOR series ideal for high precision in the nanometer range for optics, laser–use, and any other type of high resolution positioning applications.
Technical Data
UNIT
TRITOR 101
TRITOR 101 SG
TRITOR 102
TRITOR 102 SG
Part #
T-404-00
T-404-01
T-405-00
T-405-01
Axis
X, Y, Z
X, Y, Z
X, Y, Z
X, Y, Z
Motion in Open-Loop (±10%)*
μm
100
100
100
100
Motion in Closed-Loop*
μm
–
80
–
80
Resolution**
nm
0.2
2
0.2
2
Dimensions (L x W x H)
mm
68 x 68 x 30
68 x 68 x 30
80 x 80 x 30
80 x 80 x 30
Weight
g
480
570
520
610
*Typical value measured with a NV 40/3 CLE amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.
