• 3D nano-positioning stage
  • Compact design
  • Flexure hinge design without mechanical play
  • Motion range up to 9 µm
  • Ultra precise translation based on FEA-optimized parallelogram design
  • High resolution positioning
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microTRITOR – Description

The unique three-dimensional microTRITOR piezo stage, uses elements that are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 9 µm in all three axes can be realized. The resolution is in the sub-nm range.

The microTRITOR can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to its design the microTRITOR is suitable for dynamic applications.

Technical Data

Part #T-400-00
AxisX, Y, Z
Motion in Open-Loop (±10%)*μm9
Resolution Open-Loop**nm0.02
Dimensions (L x W x H)mm15 x 15 x 15
*Typical value measured with a NV 40/3 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

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