- 3D nanopositioning stage
- Compact design
- Flexure hinge design without mechanical play
- Motion range up to 38 µm
- Ultra precise translation based on FEA-optimized parallelogram design
- High resolution positioning
The unique three-dimensional miniTRITOR piezo stage, uses elements that are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 38 µm in all three axes can be realized. The resolution is in the sub-nm range.
The miniTRITOR can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to its design the miniTRITOR is suitable for dynamic applications.
|Axis||X, Y, Z|
|Motion in Open Loop (±10%)*||μm||38|
|Resolution Open Loop**||nm||0.07|
|Dimensions (L x W x H)||mm||19 x 19 x 16|