The PZ 250 CAP WL was developed for the precise positioning of semiconductor wafers with diameters up to 12”. In closed-loop operation the actuator offers motion in Z direction of 250 μm. Equipped with a capacitive sensor that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be held with high stability for a long periods. Due to its high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.
The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, and mask inspection.
|UNIT||PZ 250 CAP WL|
|Part #||S-627-51 D|
|Motion in Open Loop (±10%)*||μm||350|
|Motion in Closed Loop*||μm||250|
|Dimensions (L x W x H)||mm||400 x 380 x 20|