Due to solid state flexure and parallelogram construction, the PZ 200 nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z axis nano-positioning stage can run dynamically.

The PZ 200 can optionally be equipped with a measurement system (strain gauge or capacitive sensors) that compensates for hysteresis.

Due to solid state flexure and parallelogram construction, the PZ 38 nano-positioning stage can travel without any mechanical play in the X and Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.

The PZ 38 can optionally be equipped with measurement systems (strain gauge or capacitive sensors) that compensate for hysteresis.

The nanoSX 800 combines the high accuracy and the high speed of a piezo positioning system with a special actuating design for long travel motion. The stage offer a compact design with a height of only 20 mm, outside dimensions of only 60 x 60 mm, and a free center space of 12,5 mm.

The ultra flat design of the stage and the ease to combine the stage to an XY scanning system make the system useful for a wide variety of applications.

Based on the unique bi-directional actuating nanoX design, this series can move high load masses. The design guarantees excellent guidance accuracy without parasitic motion and improves the settling time in an active manner.

The nanoSX 800 can be equipped with a high resolution feedback system for closed-loop control.

Common applications for this stage include high resolution metrology, X and XY scanning, and dynamic positioning. It is available in cryogenic and vacuum compatible versions.

The piezo based nanoX® 400 is our ultra fast and high load positioning stage. It provides a positioning and scanning range of up to 480 micrometers. The centrally located free aperture allows laser optical applications through the stage. This is also possible when stacking them in an X, Y configuration. Due to FEA-optimization, the nanoX® 400 provides the highest dynamical performance and excellent guiding accuracy. This is accomplished even with high mass loads in a very compact package. The nanoX series is made for nano-positioning tasks in the field of semiconductor, laser & optics and test & measurement.

Our piezo stage optimization also incorporates excellent temperature compensation properties for the trajectory of the nanopositioning stage. The sophisticated monolithic guidance design of the solid flexure hinges means the trajectory is free of mechanical play and friction – a feature of all piezo stages and nano-positioners.

Based on solid-state phenomena, piezo actuators and piezo ceramics generate pressure forces to affect the leverage geared motion. The PZT ceramic’s extension is nearly linear to the applied electric field, but hysteresis and creep still exist. Piezo electrical geared stages and positioners are neither affected by nor produce magnetic fields. In cryogenic environments piezo actuators function down to almost zero Kelvin. This low temperature is associated with linear decreasing extension behavior. In vacuum conditions, piezo actuators and PZT ceramics can be used at pressures below 10 Pa.

Because of the greatly reduced dielectric breakdown strength of air, they should not be operated in pressures ranging from 10 Pa up to 10 kPa. To avoid creep and hysteresis, the piezo nano-positioner nanoX® 400SG or nanoX® 400CAP are equipped with a high resolution measurement sensor.

In combination with the piezo controller, high stability, linearity, repeatability and accuracy are achieved during closed-loop operation.

The compact piezo stage design and the raster pin and drill holes for mounting allow an easy integration of the nano-positioning stages nanoX into your existing assembly. Vacuum and cryogenic versions are available on demand, as well as body material variations of invar, superinvar, aluminum and titanium.

The high load piezo positioner nanoX®200 is a ultra fast and high load capability nanoX® stage. It provides a positioning and scanning range of up to 240 micrometers. The centrally located free aperture allows laser optical applications. This is also possible, when stacking them in an XY configuration.

Due to FEA-optimization, the nanoX®200 provides high dynamical performance and excellent guiding accuracy. This is accomplished even with high mass loads in a very compact stage. The nanoX® series is made for nano-positioning tasks in the field of semiconductor, laser & optics and test & measurement.

Our piezo stage optimization also incorporates excellent temperature compensation properties for the trajectory of the nanopositioning stage. The sophisticated monolithic guidance design of the solid flexure hinges means the trajectory is free of mechanical play and friction – a feature of all piezosystem piezo stages and nanopositioners.

Please note: Based on solid-state phenomena, piezo actuators and piezo ceramics generate pressure forces to affect the leverage geared motion. The PZT ceramic’s extension is nearly linear to the applied electric field, but hysteresis and creep still exist. Piezo electrical geared stages and positioners are neither affected by nor produce magnetic fields. In cryogenic environments piezo actuators function down to almost zero Kelvin. This low temperature is associated with linear decreasing extension behavior. In vacuum conditions, piezo actuators and PZT ceramics can be used at pressures below 10 Pa.

Because of the greatly reduced dielectric breakdown strength of air, they should not be operated in pressures ranging from 10 Pa up to 10 kPa. To avoid creep and hysteresis, the piezo nano-positioner nanoX® 200SG / 200CAP is equipped with a high resolution measurement sensor.
In combination with the piezo controller, high stability, linearity, repeatability and accuracy are achieved during closed-loop operation. 

The compact piezo stage design and the raster pin and drill holes for mounting allow an easy integration of the nano-positioning stages nano®X into your existing assembly. Vacuum and cryogenic versions are available on demand, as well as body material variations of invar, superinvar, aluminum, or titanium.