The MIPOS 600 SG offers a nanopositioning and scanning range up to 600 µm in open-loop operation, and 500 µm in closed-loop using a strain-gauge sensor. It can be used with objectives that have a diameter of up to 40 mm.
Unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 600 SG can be guaranteed by the use of the strain-gauge integrated measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and highly parallel motion.
Due to the unique features of the MIPOS 600 SG, fast scanning applications can be accurately realized with short settling times.
Technical Data
Unit
MIPOS 600 SG
Part Number
O-380-01D
Axis
Z
Motion in Open-Loop (±10%)*
μm
600
Motion in Closed-Loop (±0,2%)*
μm
500
Resolution Open-Loop**
nm
0.9
Resolution Closed-Loop**
nm
12
Dimensions (L x W x H)
mm
60.5 x 50 x 40.1
Weight
g
370
*Typical values measured with a 0.7 mV controller. **The resolution is only limited by the noise of the power amplifier and metrology.
The PZ 250 CAP WL was developed for the precise positioning of semiconductor wafers with diameters up to 12”. In closed-loop operation the actuator offers motion in Z direction of 250 μm. Equipped with a capacitive sensor that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be held with high stability for a long periods. Due to its high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.
The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, and mask inspection.
Technical Data
UNIT
PZ 250 CAP WL
Part #
S-627-51 D
Axis
Z
Motion in Open-Loop (±10%)*
μm
350
Motion in Closed-Loop*
μm
250
Resolution**
nm
3
Dimensions (L x W x H)
mm
400 x 380 x 20
Weight
g
2500
*Typical value measured with a 30DV50 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.
Ring type actuators are based on an open-center cylindrical design. Compared with stack type actuators, ring actuators have a higher bending stability, better heat management efficiency and allow access to the system’s axis. Given the same volume of PZT material, a ring actuator has a larger total diameter, which results in an increase in stability against bending and buckling forces applied to the actuator. Their overall larger surface also removes heat quicker from the system, which allows them to run at much higher frequencies than stack type actuators without overheating. The hpower ring series is offered with or without preload, and with or without optional casing.
Our ring actuators can achieve a motion range of up to 130µm, while generating maximum forces of up to 35kN.
The hpower rings can be customized with low temperature modification, thermostability and cooling options and even an axial cable exit, giving you more freedom and flexibility with your application design.
Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
hpower solid stack actuators are comprised of our smart PZT ceramics, optimized to deliver high power with dynamic performance. hpower stack actuators are unique with a disk layering design, and serve as the straight forward solution to many applications. These actuators feature a motion range up to 260 µm and higher upon request – with forces up to 50kN.
All of our piezo actuators have both encased and bare stack options, with and without a preload. Preloaded actuators allows for increased dynamic capabilities by protecting the system from problematic tensile forces. Encasing the actuators also protects them from the environment, and can be augmented to allow for operation in vacuum conditions and increased thermo-stability for longer run times. All of our actuators can also have acceleration/force measurement and position systems integrated.
The PSt series comes without casing and without a preload. The PSt VS series comes with casing and with a preload. There is a wide variety of hpower high-power piezo actuators (stacks and rings) available for applications such as materials testing and shock generation.
Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
Series RA ring actuators consist of a large number of contacted ceramic discs. Compared with a tube actuator, the ring actuator reaches a higher stiffness and the expansion is twice as high.
Series RA piezo actuators are encased, and also include a mechanical pre-load so they can be used in dynamic applications.
Series RA actuators are available for open-loop systems, and closed-loop (strain gauge) systems.
Please ask for a screwing top plate for easy mounting of mirrors.
Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
RA 12/24
RA 50/35
RA 12/24SG
RA 50/35SG
Part #
P-401-10
P-406-10
P-401-11
P-406-11
Motion Open-Loop (±10%)*
μm
12
50
–
–
Motion Closed-Loop (±0.2%)
μm
–
–
10
40
Capacitance (±20%)**
μF
2.9
24
2.9
24
Stiffness
N/μm
160
80
160
80
Resolution Open-Loop***
nm
0.03
0.1
–
–
Resolution Closed-Loop
nm
–
–
0.5
2.0
Dimensions – Length
mm
36.5
70.5
36.5
70.5
Outer Diameter
mm
24
35
24
35
*Typical value measured with an NV 40/1 CLE amplifier. **Typical value for small electrical field strength. ***The resolution is only limited by the noise of the power amplifier.
