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PU 100

PU 100 – Description

The PU 100 consists of only one metallic part that allows for excellent mechanical stability and the ability for it to work dynamically.

This translation stage shows a nearly linear motion by an applied voltage signal from -20 up to 130 V.

This stage can be combined for XYZ 3D motion systems. The basic flexure stage is equipped with the threads for mounting. Each piezo system is supplied with the necessary screws and parts for a multi-axis configuration.

Technical Data

UNITPU 100PU 100 SG
Part #T-502-00T-502-01
Axis11
Motion in Open Loop (±10%)*μm100100
Motion in Closed Loop (±0,2%)*μm80
Resolution Open Loop**nm0.20.2
Resolution Closed Loop**nm2.0
Dimensions (L x W x H)mm50.5 x 25 x 2550.5 x 25 x 25
Weightg7274
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

PU 40

PU 40 – Description

The PU 40 consists of only one metallic part that allows for excellent mechanical stability and the ability for it to work dynamically.

This translation stage shows a nearly linear motion by an applied voltage signal from -20 up to 130 V.

This stage can be combined for X, Y, Z 3D motion systems. The basic flexure stage is equipped with the threads for mounting. Each piezo system is supplied with the necessary screws and parts for a multi-axis configuration.

Technical Data

UNITPU 40PU 40 SG
Part #T-506-00T-506-01
Axis11
Motion in Open-Loop (±10%)*μm4040
Motion in Closed-Loop (±0,2%)*μm32
Resolution Open-Loop**nm0.08
Resolution Closed-Loop**nm0.8
Dimensions (L x W x H)mm28.5 x 14 x 1428.5 x 14 x 14
Weightg2727
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.

PX 1500

PX 1500 – Description

Due to the development of new lever transmission principles, the PX 1500 can produce a large displacement of up to 1.5 mm. This is an extraordinary parameter for a piezoelectric direct-driven system. The PX 1500 can be used in applications usually reserved for motorized linear stages only.

In comparison with motorized stages, the piezo driven PX 1500 offers important advantages – dynamic speed and single step-size resolution

The lever transmission principle is based on solid state hinges with integrated preload, that allows a high dynamic movement without mechanical play.

Because of its compact dimensions the PX 1500 is well suited for OEM applications.

Technical Data

UNITPX 1500
Part #S-622-00
AxisX
Motion in Open-Loop (±10%)*μm1500
Resolution Open-Loop**nm3
Dimensions (L x W x H)mm87 x 34 x 13
Weightg98
*Typical value measured with a NV 40/3 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.

PX 500

PX 500 – Description

The PX 500 linear actuator was developed especially for OEM applications. Without external loads, the piezoelectric element can reach a motion of 500 µm.

The PX 500 piezo flexure stage is especially suited for system integration due to its small dimension. The construction is based on solid-state hinges that provide a levered transmission of the piezo elements.

The PX 500 is ideally suited for micro-positioning optical components, such as mirrors and laser diodes, or for opening and closing micro fluid valves. 

The element can be mounted to a fixture using one of the holes (2.2 mm diameter). The other hole will move in relation to this one.

Technical Data

UNITPX 500
Part #S-605-89
AxisX
Motion in Open-Loop (±10%)*μm500
Resolution Open-Loop**nm1.2
Dimensions (L x W x H)mm52 x 20 x 8
Weightg14
*Typical value measured with a NV 40/3 amplifier **The resolution is only limited by the noise of the power amplifier and metrology.

PX 400

PX 400 Description

The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play. They provide a much higher resolution than is possible with mechanical or electromechanical systems.

The PX 400 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with many degrees of freedom.

These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.

Technical Data

UNITPX 400PX 400 SGPX 400 CAP
Part #T-108-00T-108-01T108-06
AxisXXX
Motion in Open Loop (±10%)*μm400
Motion in Closed Loop (±0,2%)*μm320320
Resolution Open Loop**nm0.8
Resolution Closed Loop**nm84
Dimensions (L x W x H)mm52 x 48 x 2052 x 48 x 2070.7 x 48 x 20
Weightg175175210
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier) **The resolution is only limited by the noise of the power amplifier and metrology.