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PZS 4

Description

The PZS 4 consists of two slit edges that are driven by a single piezoelectric actuator. Solid state flexure hinges with a parallelogram design are used for the construction of this piezo slit element in order to ensure the synchronization of the slit edges with respect to the center line.

This piezo slit PZS system is available in a UHV compatible version with different body and slit edge material (INVAR).

Technical Data

PZS SeriesUNITPZS 4
Part #O-101-80
Opening (±10%)*μm0 to 300
Capacitance (± 20%)μF2.5
Resolution Open Loop**nm0.6
Resonant FrequencyHz500
Dimensions (L x W x H)mm50 x 50 x 14
Weightg115
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier). **Typical value for small electrical field strength.

PZS 3

Description

The PZS 3 system consists of two slit edges that are driven by a single piezoelectric actuator. Solid state flexure hinges with a parallelogram design were used for the construction of this piezo slit element in order to ensure the synchronization of the slit edges with respect to the center line.

This system is available in a UHV compatible version with a different body and slit edge material (INVAR).

Technical Data

PZS SeriesUNITPZS 3
Part #O-103-00
Opening (±10%)*μm0 to 1500
Capacitance (± 20%)μF7.2
Resolution Open Loop**nm3
Resonant FrequencyHz200
Dimensions (L x W x H)mm96 x 25 x 14
Weightg70
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier). **Typical value for small electrical field strength.

PZS 2

Description

The PZS 2 two slit edges are driven by a single piezoelectric actuator. The piezoelectric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better.

The piezo slit system PZS is available in a UHV compatible version with a different body and slit edge material (INVAR).

Technical Data

PZS SeriesUNITPZS 2
Part #O-102-00
Opening (±10%)*μm0 to 60
Capacitance (± 20%)μF0.7
Resolution Open Loop**nm0.01
Resonant FrequencyHz1400
Dimensions (L x W x H)mm22 x 22 x 9.5
Weightg100
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier). **Typical value for small electrical field strength.

PZS 1

Description

The PZS 1 two slit edges are driven by a single piezoelectric actuator. The piezoelectric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better.

The piezo slit system PZS is available in a UHV compatible version with a different body and slit edge material (INVAR).

Technical Data

PZS SeriesUNITPZS 1
Part #O-101-00
Opening (±10%)*μm0 to 230
Capacitance (± 20%)μF1.8
Resolution Open Loop**nm0.05
Resonant FrequencyHz450
Dimensions (L x W x H)mm42 x 42 x 14
Weightg115
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier). **Typical value for small electrical field strength.