Piezo Slit System PZS 3
- Symmetrical movement of 2 slit edges
- Driven by 1 piezo actuator
- Opening up to 1500 µm
- Nanometer resolution
- Vacuum compatible version
- Optional measurement system
The PZS 3 system consists of two slit edges that are driven by a single piezoelectric actuator. Solid state flexure hinges with a parallelogram design were used for the construction of this piezo slit element in order to ensure the synchronization of the slit edges with respect to the center line.
This system is available in a UHV compatible version with a different body and slit edge material (INVAR).
|PZS Series||UNIT||PZS 3|
|Opening (±10%)*||μm||0 to 1500|
|Capacitance (± 20%)||μF||7.2|
|Resolution Open Loop**||nm||3|
|Dimensions (L x W x H)||mm||96 x 25 x 14|