Piezo Slit System PZS 3

  • Symmetrical movement of 2 slit edges
  • Driven by 1 piezo actuator
  • Opening up to 1500 µm
  • Nanometer resolution
  • Vacuum compatible version
  • Optional measurement system
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Description

The PZS 3 system consists of two slit edges that are driven by a single piezoelectric actuator. Solid state flexure hinges with a parallelogram design were used for the construction of this piezo slit element in order to ensure the synchronization of the slit edges with respect to the center line.

This system is available in a UHV compatible version with a different body and slit edge material (INVAR).

Technical Data

PZS SeriesUNITPZS 3
Part #O-103-00
Opening (±10%)*μm0 to 1500
Capacitance (± 20%)μF7.2
Resolution Open Loop**nm3
Resonant FrequencyHz200
Dimensions (L x W x H)mm96 x 25 x 14
Weightg70
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier). **Typical value for small electrical field strength.

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