Piezo Slit System PZS 1
- Symmetrical movement of 2 slit edges
- Driven by 1 piezo actuator
- Opening up to 230 µm
- Nanometer precise resolution
- Vacuum compatible version
- Optional measurement system
- Steel slit edges also available
The PZS 1 two slit edges are driven by a single piezoelectric actuator. The piezoelectric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better.
The piezo slit system PZS is available in a UHV compatible version with a different body and slit edge material (INVAR).
|PZS Series||UNIT||PZS 1|
|Opening (±10%)*||μm||0 to 230|
|Capacitance (± 20%)||μF||1.8|
|Dimensions (L x W x H)||mm||42 x 42 x 14|