Piezo Slit System PZS 1

  • Symmetrical movement of 2 slit edges
  • Driven by 1 piezo actuator
  • Opening up to 230 µm
  • Nanometer precise resolution
  • Vacuum compatible version
  • Optional measurement system
  • Steel slit edges also available
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Description

The PZS 1 two slit edges are driven by a single piezoelectric actuator. The piezoelectric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better.

The piezo slit system PZS is available in a UHV compatible version with a different body and slit edge material (INVAR).

Technical Data

PZS SeriesUNITPZS 1
Part #O-101-00
Opening (±10%)*μm0 to 230
Capacitance (± 20%)μF1.8
Resolution Open Loop**nm0.05
Resonant FrequencyHz450
Dimensions (L x W x H)mm42 x 42 x 14
Weightg115
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier). **Typical value for small electrical field strength.