Piezo Slit System PZS 1
- Symmetrical movement of 2 slit edges
- Driven by 1 piezo actuator
- Opening up to 230 µm
- Nanometer precise resolution
- Vacuum compatible version
- Optional measurement system
- Steel slit edges also available
The PZS 1 two slit edges are driven by a single piezoelectric actuator. The piezoelectric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better.
The piezo slit system PZS is available in a UHV compatible version with a different body and slit edge material (INVAR).
PZS Series | UNIT | PZS 1 |
---|---|---|
Part # | – | O-101-00 |
Opening (±10%)* | μm | 0 to 230 |
Capacitance (± 20%) | μF | 1.8 |
Resolution Open-Loop** | nm | 0.05 |
Resonant Frequency | Hz | 450 |
Dimensions (L x W x H) | mm | 42 x 42 x 14 |
Weight | g | 115 |