Piezo Slit System PZS 2

  • Symmetrical movement of 2 slit edges
  • Driven by 1 piezo actuator
  • Opening up to 60 µm
  • Nanometer resolution
  • Vacuum compatible version
  • Optional measurement system
  • Steel slit edges also available
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Description

The PZS 2 two slit edges are driven by a single piezoelectric actuator. The piezoelectric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better.

The piezo slit system PZS is available in a UHV compatible version with a different body and slit edge material (INVAR).

Technical Data

PZS SeriesUNITPZS 2
Part #O-102-00
Opening (±10%)*μm0 to 60
Capacitance (± 20%)μF0.7
Resolution Open Loop**nm0.01
Resonant FrequencyHz1400
Dimensions (L x W x H)mm22 x 22 x 9.5
Weightg100
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier). **Typical value for small electrical field strength.

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