Piezo Slit System PZS 2
- Symmetrical movement of 2 slit edges
- Driven by 1 piezo actuator
- Opening up to 60 µm
- Nanometer resolution
- Vacuum compatible version
- Optional measurement system
- Steel slit edges also available
The PZS 2 two slit edges are driven by a single piezoelectric actuator. The piezoelectric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better.
The piezo slit system PZS is available in a UHV compatible version with a different body and slit edge material (INVAR).
|PZS Series||UNIT||PZS 2|
|Opening (±10%)*||μm||0 to 60|
|Capacitance (± 20%)||μF||0.7|
|Resolution Open Loop**||nm||0.01|
|Dimensions (L x W x H)||mm||22 x 22 x 9.5|