Piezo Slit System PZS 2
- Symmetrical movement of 2 slit edges
- Driven by 1 piezo actuator
- Opening up to 60 µm
- Nanometer resolution
- Vacuum compatible version
- Optional measurement system
- Steel slit edges also available
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PZS 2 – Description
The PZS 2 two slit edges are driven by a single piezoelectric actuator. The piezoelectric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better.
The piezo slit system PZS is available in a UHV compatible version with a different body and slit edge material (INVAR).
Technical Data
| PZS Series | UNIT | PZS 2 |
|---|---|---|
| Part # | – | O-102-00 |
| Opening (±10%)* | μm | 0 to 60 |
| Capacitance (± 20%) | μF | 0.7 |
| Resolution Open-Loop** | nm | 0.01 |
| Resonant Frequency | Hz | 1400 |
| Dimensions (L x W x H) | mm | 22 x 22 x 9.5 |
| Weight | g | 100 |
