High resonant frequency for precise line-scanning applications
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PXY 102 – Description
The PXY 102 piezo stage is compact and offer motions of up to 100 µm in open-loop in X and Y axes. The unique cube-like mechanical design allows parallel motion without play. It is well suited for many applications reaching from optical research to OEM systems. Probe alignment in microscopes usually requires an open center space for the passage of light. The PXY 102 with it’s central aperture of 40 mm was developed considering this application.
High stiffness, in combination with excellent straightness of motion, makes the PXY 102 ideal for high precision in the nanometer range for optics, laser technique, and any other types of high resolution positioning applications.
Piezoelectric actuators can work much faster and with a higher accuracy to a signal change, than motorized drives. Each axis can be controlled separately in closed-loop mode. An integrated sensor system is an available option that guarantees accuracy in the nanometer range.
The simultaneous motion in XY directions offers a large degree of freedom during use. The PXY 102 can be made with special materials for extraordinary applications such as working in a vacuum or cryogenic environment.
Technical Data
UNIT
PXY 102
PXY 102 SG
PXY 102 CAP
Part #
T-205-10
T-205-11
T-205-16
Axis
X, Y
X, Y
X, Y
Motion in Open-Loop (±10%)*
μm
100
100
100
Motion in Closed-Loop (±0.2%)*
–
80
80
Resolution Open-Loop**
nm
0.2
0.2
0.2
Resolution Closed-Loop**
–
2
1
Dimensions (L x W x H)
mm
80 x 80 x 30
80 x 80 x 30
80 x 80 x 30
Weight
g
520
610
700
*Typical value measured with a NV 40/3 amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.