PXY 100

  • Accurate parallel motion
  • Up to 100 µm motion range
  • Without mechanical play
  • Easily combined with other piezoelectric systems
  • Precision pin holes for accurate adjustment
  • High dynamic range
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PXY 100 – Description

The PXY 100 solid-state hinges in a parallelogram construction provide parallel motion without mechanical play in the X and Y directions. This construction design results in a high resolution solution which far surpasses the resolution of mechanical and electromechanical positioning systems.

The nanopositioning PXY 100 can easily be mounted to other positioning systems and can be equipped with strain gauge measurement to overcome the effect of hysteresis. Cryo and vacuum PXY 100 versions are also available.

Dynamic operation is possible. The PXY 100 is well suited for solving scanning issues.

Technical Data

Part #T-203-00T-203-01T-203-06
AxisX, YX, YX, Y
Motion in Open-Loop (±10%)*μm100100100
Motion in Closed-Loop (±0.2%)*8080
Resolution Open-Loop**nm0.20.20.2
Resolution Closed-Loop**21
Dimensions (L x W x H)mm40 x 40 x 2060 x 60 x 2165 x 65 x 20
*Typical value measured with a NV 40/3 amplifier (closed-loop: NV 40/3 CLE amplifier). **The resolution is only limited by the noise of the power amplifier and metrology.

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