Very Small Piezo 1 Axis Tilting Stage

PSH 4/1

  • Smallest piezo scanner available
  • 4 mrad tilting range
  • 1-axis ± tilting platform
  • 6.5 kHz resonant frequency
  • Sub-µrad resolution
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PSH 4/1 – Description

The piezoelectrical mirror tilting systems of the piezo mirror tilting and scanning platform PSH 4/1 is designed for ultra fast positioning tasks with nanometer accuracy. It is well suited for beam steering, scanning applications, vibration control, beam alignment and beam tracking tasks.

The PSH 4/1 was developed as an ultra fast scanning system for kHz frequencies. The miniature system is based on two active actuators. It provides ± tilting with a total travel range of up to 4 mrad. Because of the internal pre-load, the system shows a very short settling time and the resonant frequency is greater than 6.5 kHz when unloaded.

Because of the special flexure hinge design (FEA calculated) the system is free of friction and mechanical play. The piezo mirror tilting and scanning platforms PSH 4/1 is available in cryogenic and vacuum versions. Optical components such as mirrors can be mounted directly on top of the system plate.

Technical Data

Part #K-120-00
Tilting Range (±10%)*mrad ( ˚ )± 2
Dimensions (Diameter x Length)mmØ 12 x 20
*Typical value measured with piezo controller 30Dv50. **The resolution is only limited by the noise of the power amplifier and metrology.

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