- Highly dynamic tilting system
- Tilting axes in perpendicular orientation
- +/- tilting up to 16 mrad optical
- High resonant frequency due to high stiffness
- Sub-µrad resolution
- Microsecond rise time
The PSH 10/2 mirror positioning system consists of 4 piezoelectric actuators – 2 stacks for each axis, controlled in conjunction with each other. These actuators provide tilt to the top plate on 2 rectangular axes. Their construction is temperature compensated so that changes of the surrounding temperature do not affect the tilting angle. This tilting positioning stage is designed for “plus-minus tilting”. Mirror mounts are pre-loaded, thus they are well suited for dynamic applications.
The high resonant frequency of this mirror positioning systems also allows for excellent dynamic operation. An integrated strain gauge measurement system is available for closed-loop application.
|UNIT||PSH 10/2||PSH 10/2 SG|
|Axes||X, Y||X, Y|
|Max. Tilt Per Axis in Open-Loop (±10%)||mrad||±4||–|
|Max. Tilt Per Axis in Closed-Loop (±0.2%)||mrad||–||±4|
|Resolution in Open-Loop*||µrad||0.02||–|
|Resolution in Closed-Loop*||µrad||–||0.2|
|Dimensions||mm||22 x 22 x 47.5||22 x 22 x 53|