MICI 200

  • Motion of up to 200 µm
  • High precision adjustment of linear positioner
  • Motion without mechanical play
  • Precise adjustment of heavy loads
  • High resonant frequency
  • MICI 200 is compatible with Series 152 micrometer drives from "Mitutoyo"
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Description

The micrometer screw piezosystem MICI 200 is based on a high load piezo actuating system with a lever transmission, which allows for a range of motion of up to 250 µm in open loop mode (without feedback control).

Pre-adjustment is done by the measuring screw and the final fine adjustment is made by the MICI element. Through this, the accuracy and reproducibility of the linear stage system can be improved significantly. The achievable resolution is down to the sub-nm range.

The important advantage of the micrometer screw piezosystem MICI 200 system is the simple installation into an existing system, upgrading it to achieve sub-nm resolution.

Technical Data

MICI SeriesUNITMICI 200
Part # S-703-00
AxisX
Motion in Open Loop (±10%)*μm250
Resolution Open Loop**nm0.56
Dimensions (L x W x H)mm85 x 28 36.5
Weightg280
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 Controller) **The resolution is only limited by the noise of the power amplifier and metrology.

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