The micrometer screw piezo drive MICI 80 is well suited for improving the positioning accuracy of linear stages.
The MICI 80 is a piezoelectrical actuator which, in combination with a micrometer screw is mounted onto a linear stage. Pre-adjustment is done by the measuring screw and the final fine adjustment is made by the MICI element. Typically the piezo driven system generates forces up to 216 N. The resolution is in the sub-nm range.
The major advantage of the micrometer screw piezo drive MICI is that it can be easily installed into an existing system to achieve sub-nm resolution. The travel range of the micrometer screw should be shorter than the travel range of the linear stage.
| MICI Series | UNIT | MICI 80 | MICI 180 |
|---|---|---|---|
| Part # | S-702-00 | S-704-00 | |
| Axis | X | X | |
| Motion in Open-Loop (±10%)* | μm | 80 | 180 |
| Resolution Open-Loop** | nm | 0.1 | 0.4 |
| Dimensions (L x W x H) | mm | 64 x 27 x 33.5 | 64 x 27 x 35.4 |
| Weight | g | 180 | 165 |
