The micrometer screw piezo drive MICI 80 is well suited for improving the positioning accuracy of linear stages.
The MICI 80 is a piezoelectrical actuator which, in combination with a micrometer screw, is mounted onto a linear stage. Preadjustment is done by the measuring screw and the final fine adjustment is made by the MICI element. Typically, the piezo driven system generates forces up to 216 N. The resolution is down to the sub-nm range.
The major advantage of the micrometer screw piezo drive MICI is that it can be installed into an existing system easily. Your system can be upgraded to achieve sub-nm resolution. Please make sure, that the travel range of the micrometer screw is shorter than the travel range of the linear stage.
| MICI Series | UNIT | MICI 80 | MICI 180 |
|---|---|---|---|
| Part # | S-702-00 | S-704-00 | |
| Axis | X | X | |
| Motion in Open-Loop (±10%)* | μm | 80 | 180 |
| Resolution Open-Loop** | nm | 0.1 | 0.4 |
| Dimensions (L x W x H) | mm | 64 x 27 x 33.5 | 64 x 27 x 35.4 |
| Weight | g | 180 | 165 |
