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Series R

Series R Actuators – Description

Series R ring actuators consist of a large number of contacted ceramic discs. Compared with a tube actuator, the ring actuator reaches a higher stiffness and the expansion is twice as high.

Series R piezo actuators are without casing, and without a pre-load. They are only connected at the ceramic top and ground plate. These ring actuators (without a pre-load) should not be used in dynamic applications.

Series R actuators are for open-loop systems only.

Please ask for a screwing top plate for easy mounting of mirrors.

Technical Data

(See Datasheet PDFs below this chart for the complete list of product variations)

3 Example ProductsUNITR 12/14R 25/20R 50/20
Part #P-401-00P-404-00P-406-00
Motion Open-Loop (±10%)*μm122550
Capacitance (±20%)**μF2.91224
StiffnessN/μm16016080
Resolution Open-Loop***nm0.030.050.1
Dimensions – Heightmm13.52754
Outer Diametermm142020
*Typical value measured with an NV 40/1 CLE amplifier. **Typical value for small electrical field strength. ***The resolution is only limited by the noise of the power amplifier.

Series PAHS

Series PAHS – Description

The new PAHS piezo actuators achieve higher motion than a conventional actuator of similar length. With more than four times higher travel they are a perfect solution when space is limited but high resolution requirements exist.

PAHS actuators operate with the same voltage band of 150V and can therefore be easily integrated into existing systems using the same controllers.

Like PAHL piezo actuators, PAHS actuators have high blocking forces and can move large masses. Due to the integrated mechanical pre-load, they can work under tensile forces and in dynamic applications. They also have high resonant frequencies guaranteeing fast settling times.

Technical Data

(See Datasheet PDF below this chart for the complete list of product specifications)

ModelsUNITPAHS 40PAHS 240
Part #P-181-00P-186-00
Motion @ -20…130V*μm40240
Capacitance **μF3.521
Resolution OL***nm0.090.54
Dimensions – Lengthmm4691
Diametermm2020
*Typical value measured with 0.3mV controller. **Typical value for a small electrical field strength. ***Typical values, measured at -20V…+130V.

Series P/S

Series P/S Description

P/S piezo actuators have a hermetically sealed housing that allows for use in aggressive and humid environments. The construction of the housing tightly encloses the stack, also reducing mechanical play.

The M3 thread in the bottom plate allows for easy adaptation in existing systems and guarantees exact positioning.

Depending on the model, these piezo actuators offer motion from 18 µm up to 70 µm.

Technical Data

(See Datasheet PDFs below this chart for the complete list of product variations)

3 Example ProductsUNITP18/S08P50/S13P7/S22
Part #P-752-30P-755-00P-757-50
Motion (±10%)*μm185070
Capacitance (±20%)**μF0.54.521.6
StiffnessN/μm11.11648.6
Resolution***nm0.030.10.14
Dimensions – Lengthmm307190.5
Diametermm81220
*Typical value measured with an NV40/3 amplifier. **Typical value for small electrical field strength. ***The resolution is only limited by the noise of the power amplifier.

Series PA, PAT and PAHL

PA, PAT & PAHL Actuators – Description

The PA, PA/T and PAHL series piezo actuators are all stack type actuators manufactured incorporating multilayer technology. They are internally pre-loaded with a mechanical spring, making them ideal for dynamic applications. The ability to generate a large force, and be subjected to high mass loading makes them particularly useful for machine tools and dynamic scanning systems. These actuators have a uniform diameter of either 14 or 20 mm depending on series. Strain gauge (SG) is used for closed-loop systems.

Piezo actuators should only be fastened with screws or clamps on the bottom plate of the actuator. During the installation and use, it is important not to subject the actuator tip to non-axial forces.

The actuator head is available in three versions: round head piece is standard, flat head option, and M3 thread on demand.

PA Series – Technical Data

(See Datasheet PDFs below this chart for the complete list of product variations)

4 Example ProductsUNITPA 8/14PA 120/14PA 8/14 SGPA 120/14 SG
Part #B-201-00B-214-00B-201-01B-214-01
Motion in Open-Loop (-10/+20%)*μm10140
Motion in Closed-Loop (±0.2%)*μm8112
Capacitance (±20%)**μF0.812.60.812.6
StiffnessN/μm856856
Resolution in Open-Loop***nm0.020.29
Resolution in Closed-Loop***nm0.12.8
Dimensions – Lengthmm2814528145
Diametermm14141414
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.

PA/T Series – Technical Data

(See Datasheet PDFs below this chart for the complete list of product variations)

4 Example ProductsUNITPA 35/T14PA 120/T14PA 35/T14 SGPA 120/T14 SG
Part #P-354-00P-360-00P-354-01P-360-01
Motion in Open-Loop (-10/+20%)*μm42125
Motion in Closed-Loop (±0.2%)*μm34100
Capacitance (±20%)**μF3.610.83.610.8
StiffnessN/μm207207
Resolution in Open-Loop***nm0.080.25
Resolution in Closed-Loop***nm0.71.0
Dimensions – Lengthmm5312553125
Diametermm14141414
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.

PAHL Series – Technical Data

(See Datasheet PDFs below this chart for the complete list of product variations)

4 Example ProductsUNITPAHL 18/20PAHL 200/20PAHL 18/20 SGPAHL 200/20 SG
Part #P-171-00P-180-00P-171-01P-180-01
Motion in Open-Loop (-10/+20%)*μm21200
Motion in Closed-Loop (±0.2%)*μm17160
Capacitance (±20%)**μF770770
StiffnessN/μm1651716517
Resolution in Open-Loop***nm0.040.4
Resolution in Closed-Loop***nm0.44.0
Dimensions – Lengthmm3619840198
Diametermm20202020
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.

Series P and PHL

Series P and PHL Actuators – Description

Series P and Series PHL piezo actuators are stack type actuators built in a multi-layer technique. PHL actuators are high-load. These P and PHL actuators both come without a pre-load, but they can still withstand a medium pressure force. PHL actuators are designed for high-load applications.

These piezo actuators are encased in a stainless steel housing.

P and PHL series actuators should be fastened with screws or clamps on the actuator’s bottom plate. These actuators are not designed for dynamic applications.

Technical Data

(See Datasheet PDFs below this chart for the complete list of all product variations)

4 Example ProductsUNITP 8/8P 80/10PHL 18/20PHL 100/20
Part #P-101-00P-117-00P-141-00P-145-00
Motion (-10%/+20%)*μm98220103
Capacitance (±20%)**μF0.187.2734
StiffnessN/μm221017535
Resolution***nm0.020.160.040.21
Dimensions – Lmm179136108
Diametermm8102020
*Typical value measured with a NV 40/3 amplifier. ** Typical value for small signal strength. **The resolution is only limited by the noise of the power amplifier.