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MICI 200

Description

The micrometer screw piezosystem MICI 200 is based on a high load piezo actuating system with a lever transmission, which allows for a range of motion of up to 250 µm in open loop mode (without feedback control).

Pre-adjustment is done by the measuring screw and the final fine adjustment is made by the MICI element. Through this, the accuracy and reproducibility of the linear stage system can be improved significantly. The achievable resolution is down to the sub-nm range.

The important advantage of the micrometer screw piezosystem MICI 200 system is the simple installation into an existing system, upgrading it to achieve sub-nm resolution.

Technical Data

MICI SeriesUNITMICI 200
Part # S-703-00
AxisX
Motion in Open Loop (±10%)*μm250
Resolution Open Loop**nm0.56
Dimensions (L x W x H)mm85 x 28 36.5
Weightg280
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 Controller) **The resolution is only limited by the noise of the power amplifier and metrology.

MICI 140

Description

The micrometer screw drive MICI 140 elements are compatible with the series of micrometer screw types G 7.5 x 24, G 7.5 x 16.5, G 10, G 15, G 25, and G 50 from Qioptiq Photonics GmbH & Co KG.

The new systems offer outstanding features, especially concerning design and resonant frequency: The micrometer screw drive MICI 140 systems offer a small and compact design, while capable of a range of motion of 140µm in open loop at resonant frequencies of > 900 Hz.

The use of the optional positioning sensor guarantees extremely high positioning stability and high reproducibility. Piezo actuators also function in cryogenic environments which are associated with a decreasing extension behavior.

Technical Data

MICI SeriesUNITMICI 140MICI 140 SG
Part # S-705-00 (S-706-00)S-705-01 (S-706-01)
AxisXX
Motion in Open Loop (±10%)*μm140140
Motion Closed Loop (±0.2%)*μm100
Resolution Open Loop**nm0.30.3
Resolution Closed Loop**nm5
Dimensions (L x W x H)mm47 x 14 x 30.447 x 14 x 30.4
Weightg120125
*Typical value measured with a NV 40/3 controller (closed loop: NV 40/3 CLE). **The resolution is only limited by the noise of the power amplifier and metrology.

MICI 80

Description

The micrometer screw piezo drive MICI 80 is well suited for improving the positioning accuracy of linear stages.

The MICI 80 is a piezoelectrical actuator which, in combination with a micrometer screw, is mounted onto a linear stage. Preadjustment is done by the measuring screw and the final fine adjustment is made by the MICI element. Typically, the piezo driven system generates forces up to 216 N. The resolution is down to the sub-nm range.

The major advantage of the micrometer screw piezo drive MICI is that it can be installed into an existing system easily. Your system can be upgraded to achieve sub-nm resolution. Please make sure, that the travel range of the micrometer screw is shorter than the travel range of the linear stage.

Technical Data

MICI SeriesUNITMICI 80MICI 180
Part # S-702-00S-704-00
AxisXX
Motion in Open Loop (±10%)*μm80180
Resolution Open Loop**nm0.10.4
Dimensions (L x W x H)mm64 x 27 x 33.564 x 27 x 35.4
Weightg180165
*Typical value measured with a NV 40/3 amplifier (closed loop: NV 40/3 Controller) **The resolution is only limited by the noise of the power amplifier and metrology.