The micrometer screw piezosystem MICI 200 is based on a high load piezo actuating system with a lever transmission. This allows for a range of motion of up to 250 µm in open-loop mode (without feedback control).

Pre-adjustment is done by the measuring screw and the final fine adjustment is made by the MICI element. This way the accuracy and reproducibility of the linear stage system can be improved significantly. The achievable resolution is in the sub-nm range.

The important advantage of the micrometer screw piezosystem MICI 200 system is the simple installation into an existing system so it can achieve sub-nm resolution.

The micrometer screw drive MICI 140 is compatible with micrometer screw types G 7.5 x 24, G 7.5 x 16.5, G 10, G 15, G 25, and G 50 from Qioptiq Photonics GmbH & Co KG.

The systems offer outstanding features, especially concerning design and resonant frequency: The micrometer screw drive MICI 140 systems offer a small and compact design, while capable of a range of motion of 140 µm in open-loop at resonant frequencies of 630 Hz.

The use of the optional positioning sensor guarantees extremely high positioning stability and high reproducibility. Piezo actuators also function in cryogenic environments which are associated with decreasing extension behavior.

The micrometer screw piezo drive MICI 80 is well suited for improving the positioning accuracy of linear stages.

The MICI 80 is a piezoelectrical actuator which, in combination with a micrometer screw is mounted onto a linear stage. Pre-adjustment is done by the measuring screw and the final fine adjustment is made by the MICI element. Typically the piezo driven system generates forces up to 216 N. The resolution is in the sub-nm range.

The major advantage of the micrometer screw piezo drive MICI is that it can be easily installed into an existing system to achieve sub-nm resolution. The travel range of the micrometer screw should be shorter than the travel range of the linear stage.