The PA, PA/T and PAHL series piezo actuators are all stack type actuators manufactured incorporating multilayer technology. They are internally pre-loaded with a mechanical spring, making them ideal for dynamic applications. The ability to generate a large force, and be subjected to high mass loading makes them particularly useful for machine tools and dynamic scanning systems. These actuators have a uniform diameter of either 14 or 20 mm depending on series. Strain gauge (SG) is used for closed-loop systems.
Piezo actuators should only be fastened with screws or clamps on the bottom plate of the actuator. During the installation and use, it is important not to subject the actuator tip to non-axial forces.
The actuator head is available in three versions: round head piece is standard, flat head option, and M3 thread on demand.
PA Series – Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
PA 8/14
PA 120/14
PA 8/14 SG
PA 120/14 SG
Part #
B-201-00
B-214-00
B-201-01
B-214-01
Motion in Open-Loop (-10/+20%)*
μm
10
140
–
–
Motion in Closed-Loop (±0.2%)*
μm
–
–
8
112
Capacitance (±20%)**
μF
0.8
12.6
0.8
12.6
Stiffness
N/μm
85
6
85
6
Resolution in Open-Loop***
nm
0.02
0.29
–
–
Resolution in Closed-Loop***
nm
–
–
0.1
2.8
Dimensions – Length
mm
28
145
28
145
Diameter
mm
14
14
14
14
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.
PA/T Series – Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
PA 35/T14
PA 120/T14
PA 35/T14 SG
PA 120/T14 SG
Part #
P-354-00
P-360-00
P-354-01
P-360-01
Motion in Open-Loop (-10/+20%)*
μm
42
125
–
–
Motion in Closed-Loop (±0.2%)*
μm
–
–
34
100
Capacitance (±20%)**
μF
3.6
10.8
3.6
10.8
Stiffness
N/μm
20
7
20
7
Resolution in Open-Loop***
nm
0.08
0.25
–
–
Resolution in Closed-Loop***
nm
–
–
0.7
1.0
Dimensions – Length
mm
53
125
53
125
Diameter
mm
14
14
14
14
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.
PAHL Series – Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
PAHL 18/20
PAHL 200/20
PAHL 18/20 SG
PAHL 200/20 SG
Part #
P-171-00
P-180-00
P-171-01
P-180-01
Motion in Open-Loop (-10/+20%)*
μm
21
200
–
–
Motion in Closed-Loop (±0.2%)*
μm
–
–
17
160
Capacitance (±20%)**
μF
7
70
7
70
Stiffness
N/μm
165
17
165
17
Resolution in Open-Loop***
nm
0.04
0.4
–
–
Resolution in Closed-Loop***
nm
–
–
0.4
4.0
Dimensions – Length
mm
36
198
40
198
Diameter
mm
20
20
20
20
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.
Series P and Series PHL piezo actuators are stack type actuators built in a multi-layer technique. PHL actuators are high-load. These P and PHL actuators both come without a pre-load, but they can still withstand a medium pressure force. PHL actuators are designed for high-load applications.
These piezo actuators are encased in a stainless steel housing.
P and PHL series actuators should be fastened with screws or clamps on the actuator’s bottom plate. These actuators are not designed for dynamic applications.
Technical Data
(See Datasheet PDFs below this chart for the complete list of all product variations)
4 Example Products
UNIT
P 8/8
P 80/10
PHL 18/20
PHL 100/20
Part #
P-101-00
P-117-00
P-141-00
P-145-00
Motion (-10%/+20%)*
μm
9
82
20
103
Capacitance (±20%)**
μF
0.18
7.2
7
34
Stiffness
N/μm
22
10
175
35
Resolution***
nm
0.02
0.16
0.04
0.21
Dimensions – L
mm
17
91
36
108
Diameter
mm
8
10
20
20
*Typical value measured with a NV 40/3 amplifier. ** Typical value for small signal strength. **The resolution is only limited by the noise of the power amplifier.
Series N piezo actuators are made for industrial applications. They consist of a large number of contacted ceramic discs. The electrodes are arranged on both sides of the ceramic discs. They are specially shielded by a flexible insulation material which guarantees the highest possible dynamic performance under the toughest requirements. Based on their design, they are well suited for easy integration into specific customer systems. Special designs are made with a centrically drilled hole.
The special flexible polymer insulation guarantees the highest performance for long term applications. It gives the PZT piezo actuators proven protection against various and harsh environments. The advantage of a flexible insulation versus brittle ceramic insulation is a longer lifetime. Results show that piezo electric actuators have worked, and continue to work, under extreme conditions for over 20 years. The insulation is also suitable for use in cryogenic and vacuum environments. Additional thermal shrink tube insulation protects the cable connection point on the ceramic.
It is important not to subject the actuator tip to non-axial forces during a manufacturing process and use. The PZT multilayer stacks are not preloaded. An external preload is applied when used in dynamic applications or in applications with high acceleration forces.
The standard cable length is 100 mm. As an option, flat tungsten carbide or ball tip end plates are available. Please note that when using these actuators under cryogenic conditions (4 K), only 10% of the standard motion is available.
The Series N piezo actuators have been successfully working for more than 20 years in a vast number of applications in the fields of nano-metrology, semiconductor, material sciences and scanning applications.
Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
N 2/5
N 25/S3.5
N 100/S5
N 120/S10
Part #
P-211-00
P-217-40
P-207-40
P-237-40
Motion (±10%)*
μm
2
30
103
123
Capacitance (±20%)**
μF
0.1
1.2
9.0
36.4
Stiffness
N/μm
250
14
8
28
Resolution***
nm
0.004
0.06
0.2
0.25
Dimensions – L x W x H
mm
L = 5
27 x 5.5 x 7.5
108 x 7 x 9
108 x 12 x 14
Diameter
mm
5
–
–
–
*Typical value measured with a NV 40/3 amplifier. ** Typical value for small signal strength. **The resolution is only limited by the noise of the power amplifier.